JPS61205137U - - Google Patents
Info
- Publication number
- JPS61205137U JPS61205137U JP8935285U JP8935285U JPS61205137U JP S61205137 U JPS61205137 U JP S61205137U JP 8935285 U JP8935285 U JP 8935285U JP 8935285 U JP8935285 U JP 8935285U JP S61205137 U JPS61205137 U JP S61205137U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- supply pipe
- upper limit
- limit level
- semiconductor devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の実施例を示す洗浄装置の概略
構成図、第２図は従来の洗浄装置の概略構成図、
第３図は第１図中の洗浄槽付近の拡大斜視図であ
る。
１……洗浄装置本体、４……洗浄槽、５……供
給口、６……排出口、７……洗浄液供給管、８…
…３方弁、９……洗浄液供給本管、１０……洗浄
液環流本管、１１……排水本管。
FIG. 1 is a schematic configuration diagram of a cleaning device showing an embodiment of the present invention, FIG. 2 is a schematic configuration diagram of a conventional cleaning device,
FIG. 3 is an enlarged perspective view of the vicinity of the cleaning tank in FIG. 1. 1... Cleaning device main body, 4... Cleaning tank, 5... Supply port, 6... Discharge port, 7... Cleaning liquid supply pipe, 8...
...Three-way valve, 9...Cleaning liquid supply main pipe, 10...Cleaning liquid circulation main pipe, 11...Drainage main pipe.
Claims (1)
給口と、洗浄液を外部へ排出する排出口とを有す
る洗浄槽を備え、前記洗浄槽における一定の上限
レベルまで満たされた洗浄液で半導体素子を洗浄
する半導体素子の洗浄装置において、 筒形をなし、その一端が前記供給口に接続され
、その他端部が前記上限レベルよりも上方に位置
する補助供給管を設け、 前記他端部を前記供給管に着脱自在に連結した
ことを特徴とする半導体素子の洗浄装置。 ２ 前記補助供給管の他端部に、空気抜き孔を設
けた実用新案登録請求の範囲第１項記載の半導体
素子の洗浄装置。[Claims for Utility Model Registration] 1. A cleaning tank having a supply port provided at the bottom and connected to a cleaning liquid supply pipe and a discharge port for discharging the cleaning liquid to the outside, the cleaning tank being filled to a certain upper limit level. In a semiconductor device cleaning apparatus for cleaning semiconductor devices with a cleaning solution, the auxiliary supply pipe has a cylindrical shape, one end of which is connected to the supply port, and the other end of which is located above the upper limit level; A cleaning device for semiconductor devices, characterized in that the other end portion is detachably connected to the supply pipe. 2. The semiconductor device cleaning apparatus according to claim 1, wherein an air vent hole is provided at the other end of the auxiliary supply pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8935285U JPS61205137U (en) | 1985-06-13 | 1985-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8935285U JPS61205137U (en) | 1985-06-13 | 1985-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61205137U true JPS61205137U (en) | 1986-12-24 |
Family
ID=30643345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8935285U Pending JPS61205137U (en) | 1985-06-13 | 1985-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61205137U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444472A (en) * | 1977-09-14 | 1979-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Cleaning unit of semiconductor substrate |
-
1985
- 1985-06-13 JP JP8935285U patent/JPS61205137U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5444472A (en) * | 1977-09-14 | 1979-04-07 | Nippon Telegr & Teleph Corp <Ntt> | Cleaning unit of semiconductor substrate |