JPS61203245U - - Google Patents
Info
- Publication number
- JPS61203245U JPS61203245U JP8648685U JP8648685U JPS61203245U JP S61203245 U JPS61203245 U JP S61203245U JP 8648685 U JP8648685 U JP 8648685U JP 8648685 U JP8648685 U JP 8648685U JP S61203245 U JPS61203245 U JP S61203245U
- Authority
- JP
- Japan
- Prior art keywords
- air
- heat exchanger
- exhaust
- heat
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Central Air Conditioning (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648685U JPS61203245U (it) | 1985-06-07 | 1985-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648685U JPS61203245U (it) | 1985-06-07 | 1985-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61203245U true JPS61203245U (it) | 1986-12-20 |
Family
ID=30637844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8648685U Pending JPS61203245U (it) | 1985-06-07 | 1985-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203245U (it) |
-
1985
- 1985-06-07 JP JP8648685U patent/JPS61203245U/ja active Pending