JPS61203245U - - Google Patents
Info
- Publication number
- JPS61203245U JPS61203245U JP8648685U JP8648685U JPS61203245U JP S61203245 U JPS61203245 U JP S61203245U JP 8648685 U JP8648685 U JP 8648685U JP 8648685 U JP8648685 U JP 8648685U JP S61203245 U JPS61203245 U JP S61203245U
- Authority
- JP
- Japan
- Prior art keywords
- air
- heat exchanger
- exhaust
- heat
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Central Air Conditioning (AREA)
Description
図面は本考案の実施例を示し、第１図は全体図
、第２図は第２熱交換器における伝熱管の拡大断
面図である。
１……クリーンルーム、２……エツチング室、
３……空調装置、４……フアン、５……排気管、
６……煙突、７……戻りダクト、８……導入管、
９……第１熱交換器、１０……第２熱交換器、１
１……熱媒体の循環経路。
The drawings show an embodiment of the present invention, and FIG. 1 is an overall view, and FIG. 2 is an enlarged sectional view of a heat exchanger tube in a second heat exchanger. 1...Clean room, 2...Etching room,
3... Air conditioner, 4... Fan, 5... Exhaust pipe,
6...Chimney, 7...Return duct, 8...Introduction pipe,
9...First heat exchanger, 10...Second heat exchanger, 1
1...Circulation path of heat medium.
Claims (1)
該空気の温度を略一定にするための空調装置を備
える一方、前記空気の一部を大気中に排気するた
めの排気口と、前記大気への排気空気量に見合う
だけの量の大気空気を導入するための導入口とを
備えて成るクリーンルームにおける空気給排装置
において、前記大気空気の導入口には第１熱交換
器を、前記排気空気の排気口には第２熱交換器を
各々設け、該第１熱交換器と第２熱交換器との間
に熱媒体の循環経路を形成したことを特徴とする
クリーンルームにおける空気給排装置。 (2) 第２熱交換器における伝熱管を、熱収縮性
の合成樹脂製チユーブにて被覆したことを特徴と
する実用新案登録請求の範囲第１項に記載したク
リーンルームにおける空気給排装置。[Claims for Utility Model Registration] (1) An air conditioner is provided in the air circulation path in the clean room to keep the temperature of the air substantially constant, while a part of the air is exhausted to the atmosphere. In a clean room air supply/exhaust device comprising an exhaust port and an inlet for introducing atmospheric air in an amount commensurate with the amount of air exhausted to the atmosphere, the atmospheric air inlet has a first heat source. The heat exchanger is provided with a second heat exchanger at each of the exhaust ports of the exhaust air, and a heat medium circulation path is formed between the first heat exchanger and the second heat exchanger. Air supply and exhaust equipment in clean rooms. (2) The air supply/discharge device for a clean room as set forth in claim 1 of the utility model registration claim, characterized in that the heat transfer tube in the second heat exchanger is covered with a heat-shrinkable synthetic resin tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648685U JPS61203245U (en) | 1985-06-07 | 1985-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8648685U JPS61203245U (en) | 1985-06-07 | 1985-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61203245U true JPS61203245U (en) | 1986-12-20 |
Family
ID=30637844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8648685U Pending JPS61203245U (en) | 1985-06-07 | 1985-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61203245U (en) |
-
1985
- 1985-06-07 JP JP8648685U patent/JPS61203245U/ja active Pending
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