JPS61202685U - - Google Patents
Info
- Publication number
- JPS61202685U JPS61202685U JP8659985U JP8659985U JPS61202685U JP S61202685 U JPS61202685 U JP S61202685U JP 8659985 U JP8659985 U JP 8659985U JP 8659985 U JP8659985 U JP 8659985U JP S61202685 U JPS61202685 U JP S61202685U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- liquid supply
- chamber
- supply device
- liquid chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims 1
- 238000009499 grossing Methods 0.000 description 2
- 230000010349 pulsation Effects 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8659985U JPS61202685U (fr) | 1985-06-07 | 1985-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8659985U JPS61202685U (fr) | 1985-06-07 | 1985-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202685U true JPS61202685U (fr) | 1986-12-19 |
Family
ID=30638058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8659985U Pending JPS61202685U (fr) | 1985-06-07 | 1985-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202685U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05240161A (ja) * | 1991-11-08 | 1993-09-17 | Almatec Technische Innovationen Gmbh | 複成隔膜ポンプ |
| JP2009299484A (ja) * | 2008-06-10 | 2009-12-24 | Tacmina Corp | ポンプ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313203A (en) * | 1976-07-22 | 1978-02-06 | Saburou Masaki | Reciprocating pumps |
-
1985
- 1985-06-07 JP JP8659985U patent/JPS61202685U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313203A (en) * | 1976-07-22 | 1978-02-06 | Saburou Masaki | Reciprocating pumps |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05240161A (ja) * | 1991-11-08 | 1993-09-17 | Almatec Technische Innovationen Gmbh | 複成隔膜ポンプ |
| JP2009299484A (ja) * | 2008-06-10 | 2009-12-24 | Tacmina Corp | ポンプ |