JPS61202461U - - Google Patents

Info

Publication number
JPS61202461U
JPS61202461U JP8487085U JP8487085U JPS61202461U JP S61202461 U JPS61202461 U JP S61202461U JP 8487085 U JP8487085 U JP 8487085U JP 8487085 U JP8487085 U JP 8487085U JP S61202461 U JPS61202461 U JP S61202461U
Authority
JP
Japan
Prior art keywords
electrode
frequency
stone
capacitor
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8487085U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230443Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8487085U priority Critical patent/JPH0230443Y2/ja
Publication of JPS61202461U publication Critical patent/JPS61202461U/ja
Application granted granted Critical
Publication of JPH0230443Y2 publication Critical patent/JPH0230443Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8487085U 1985-06-05 1985-06-05 Expired JPH0230443Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8487085U JPH0230443Y2 (enrdf_load_stackoverflow) 1985-06-05 1985-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8487085U JPH0230443Y2 (enrdf_load_stackoverflow) 1985-06-05 1985-06-05

Publications (2)

Publication Number Publication Date
JPS61202461U true JPS61202461U (enrdf_load_stackoverflow) 1986-12-19
JPH0230443Y2 JPH0230443Y2 (enrdf_load_stackoverflow) 1990-08-16

Family

ID=30634744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8487085U Expired JPH0230443Y2 (enrdf_load_stackoverflow) 1985-06-05 1985-06-05

Country Status (1)

Country Link
JP (1) JPH0230443Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0230443Y2 (enrdf_load_stackoverflow) 1990-08-16

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