JPS61202068U - - Google Patents

Info

Publication number
JPS61202068U
JPS61202068U JP8607385U JP8607385U JPS61202068U JP S61202068 U JPS61202068 U JP S61202068U JP 8607385 U JP8607385 U JP 8607385U JP 8607385 U JP8607385 U JP 8607385U JP S61202068 U JPS61202068 U JP S61202068U
Authority
JP
Japan
Prior art keywords
measuring
electrode
measurement
ion concentration
cleaning chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8607385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0413645Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985086073U priority Critical patent/JPH0413645Y2/ja
Publication of JPS61202068U publication Critical patent/JPS61202068U/ja
Application granted granted Critical
Publication of JPH0413645Y2 publication Critical patent/JPH0413645Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Automatic Analysis And Handling Materials Therefor (AREA)
JP1985086073U 1985-06-06 1985-06-06 Expired JPH0413645Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985086073U JPH0413645Y2 (enrdf_load_stackoverflow) 1985-06-06 1985-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985086073U JPH0413645Y2 (enrdf_load_stackoverflow) 1985-06-06 1985-06-06

Publications (2)

Publication Number Publication Date
JPS61202068U true JPS61202068U (enrdf_load_stackoverflow) 1986-12-18
JPH0413645Y2 JPH0413645Y2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=30637042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985086073U Expired JPH0413645Y2 (enrdf_load_stackoverflow) 1985-06-06 1985-06-06

Country Status (1)

Country Link
JP (1) JPH0413645Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116985U (enrdf_load_stackoverflow) * 1976-03-03 1977-09-05
JPS53103786U (enrdf_load_stackoverflow) * 1977-01-26 1978-08-21
JPS59168155U (ja) * 1983-04-26 1984-11-10 日本鉱業株式会社 電極洗浄装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52116985U (enrdf_load_stackoverflow) * 1976-03-03 1977-09-05
JPS53103786U (enrdf_load_stackoverflow) * 1977-01-26 1978-08-21
JPS59168155U (ja) * 1983-04-26 1984-11-10 日本鉱業株式会社 電極洗浄装置

Also Published As

Publication number Publication date
JPH0413645Y2 (enrdf_load_stackoverflow) 1992-03-30

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