JPS61201339U - - Google Patents
Info
- Publication number
- JPS61201339U JPS61201339U JP8549585U JP8549585U JPS61201339U JP S61201339 U JPS61201339 U JP S61201339U JP 8549585 U JP8549585 U JP 8549585U JP 8549585 U JP8549585 U JP 8549585U JP S61201339 U JPS61201339 U JP S61201339U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- chemical liquid
- wafer
- pure water
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims 8
- 239000007921 spray Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549585U JPS61201339U (zh) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549585U JPS61201339U (zh) | 1985-06-06 | 1985-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61201339U true JPS61201339U (zh) | 1986-12-17 |
Family
ID=30635946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8549585U Pending JPS61201339U (zh) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201339U (zh) |
-
1985
- 1985-06-06 JP JP8549585U patent/JPS61201339U/ja active Pending