JPS6120038U

JPS6120038U - Core tube for oxidation/diffusion furnace

Info

Publication number: JPS6120038U
Application number: JP10434784U
Authority: JP
Inventors: 幹夫林
Original assignee: 株式会社東芝
Priority date: 1984-07-10
Filing date: 1984-07-10
Publication date: 1986-02-05

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例にかかる炉心管の構成を示す
縦断面図、第２図は管本体の構造を示す縦断面図、第３
図ａはガス反射ユニットの外観を示す斜視図、第３図ｂ
はその断面図、第４図ａはガス導入管先端部を示す正面
図、第４図ｂはその側面図、第５図は従来の反射板一体
型の炉心管を示す縦断面図である。１，１１・・・炉心管、２Ｓ１２・・・閉塞壁、３，
１３・・・第１のガス導入管、４．１４・・・第２のガ
ス導入管、５・・・ガス反射板、６，１９・・・蓋体、
１５・・・ガス反射板ユニット、１６・・・ガス反射板
、１７・・・ボニト、１８・・・貫通孔。FIG. 1 is a vertical cross-sectional view showing the structure of a core tube according to an embodiment of the present invention, FIG. 2 is a vertical cross-sectional view showing the structure of the tube body, and FIG.
Figure a is a perspective view showing the appearance of the gas reflection unit, Figure 3 b
4 is a sectional view thereof, FIG. 4a is a front view showing the tip of the gas introduction tube, FIG. 4b is a side view thereof, and FIG. 5 is a longitudinal sectional view showing a conventional reactor core tube integrated with a reflector plate. 1, 11... Core tube, 2S 12... Closure wall, 3,
13... First gas introduction pipe, 4.14... Second gas introduction pipe, 5... Gas reflection plate, 6, 19... Lid body,
15... Gas reflector unit, 16... Gas reflector, 17... Bonito, 18... Through hole.

Claims

[Claims for Utility Model Registration] 1. A hollow tube body with one end closed and having a space for inserting and holding a semiconductor substrate to be processed, and a first end extending from the outside to the inside of the closed wall of this tube body.
a gas introduction pipe; a second gas introduction pipe that is provided adjacent to the first gas introduction pipe and communicates from the outside of the blocking wall to the inner surface of the blocking wall; and a distal end of the first gas introducing pipe. A core tube for an oxidation/diffusion furnace, comprising: a slidable gas reflector plate installed close to and facing each other; and a lid body that can be opened and closed to close an open end of the tube body. 2. The core tube for an oxidation/diffusion furnace according to claim 1, wherein the reflector has a concave curved surface. 3 Claim No. 2 for utility model registration in which the concave curved surface is an inner spherical surface
Furnace tube for oxidation/diffusion furnace as described in Section 1. 4. The core tube for an oxidation/diffusion furnace according to claim 2 of the utility model registration claim, wherein the concave curved surface is a parabolic surface. 5. The core tube for an oxidation/diffusion furnace according to any one of claims 2 to 4, which is mounted on a boat in which the reflector slides inside the tube. 6. The core tube for an oxidation/diffusion furnace according to claim 5, wherein the first gas introduction tube has a common center with the reflector.