JPS61199860U - - Google Patents

Info

Publication number
JPS61199860U
JPS61199860U JP8383285U JP8383285U JPS61199860U JP S61199860 U JPS61199860 U JP S61199860U JP 8383285 U JP8383285 U JP 8383285U JP 8383285 U JP8383285 U JP 8383285U JP S61199860 U JPS61199860 U JP S61199860U
Authority
JP
Japan
Prior art keywords
target
electron emission
beam irradiation
irradiation device
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8383285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8383285U priority Critical patent/JPS61199860U/ja
Publication of JPS61199860U publication Critical patent/JPS61199860U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8383285U 1985-06-05 1985-06-05 Pending JPS61199860U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8383285U JPS61199860U (US20100056889A1-20100304-C00004.png) 1985-06-05 1985-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8383285U JPS61199860U (US20100056889A1-20100304-C00004.png) 1985-06-05 1985-06-05

Publications (1)

Publication Number Publication Date
JPS61199860U true JPS61199860U (US20100056889A1-20100304-C00004.png) 1986-12-13

Family

ID=30632813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8383285U Pending JPS61199860U (US20100056889A1-20100304-C00004.png) 1985-06-05 1985-06-05

Country Status (1)

Country Link
JP (1) JPS61199860U (US20100056889A1-20100304-C00004.png)

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