JPS61199354U - - Google Patents

Info

Publication number
JPS61199354U
JPS61199354U JP8220785U JP8220785U JPS61199354U JP S61199354 U JPS61199354 U JP S61199354U JP 8220785 U JP8220785 U JP 8220785U JP 8220785 U JP8220785 U JP 8220785U JP S61199354 U JPS61199354 U JP S61199354U
Authority
JP
Japan
Prior art keywords
mat
polishing
support
chuck
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8220785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8220785U priority Critical patent/JPS61199354U/ja
Publication of JPS61199354U publication Critical patent/JPS61199354U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
JP8220785U 1985-05-30 1985-05-30 Pending JPS61199354U (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8220785U JPS61199354U (un) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8220785U JPS61199354U (un) 1985-05-30 1985-05-30

Publications (1)

Publication Number Publication Date
JPS61199354U true JPS61199354U (un) 1986-12-13

Family

ID=30629718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8220785U Pending JPS61199354U (un) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPS61199354U (un)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590262A (en) * 1978-12-26 1980-07-08 Nippon Telegr & Teleph Corp <Ntt> Method of manufacturing polisher
JPS58151477A (ja) * 1982-03-02 1983-09-08 Nippon Tenshiyashi Kk 金属製研磨体の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5590262A (en) * 1978-12-26 1980-07-08 Nippon Telegr & Teleph Corp <Ntt> Method of manufacturing polisher
JPS58151477A (ja) * 1982-03-02 1983-09-08 Nippon Tenshiyashi Kk 金属製研磨体の製造方法

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