JPS61199041U - - Google Patents
Info
- Publication number
- JPS61199041U JPS61199041U JP8342085U JP8342085U JPS61199041U JP S61199041 U JPS61199041 U JP S61199041U JP 8342085 U JP8342085 U JP 8342085U JP 8342085 U JP8342085 U JP 8342085U JP S61199041 U JPS61199041 U JP S61199041U
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- type drying
- spin
- turntable
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8342085U JPH0322910Y2 (ja�@�@) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8342085U JPH0322910Y2 (ja�@�@) | 1985-06-04 | 1985-06-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61199041U true JPS61199041U (ja�@�@) | 1986-12-12 |
| JPH0322910Y2 JPH0322910Y2 (ja�@�@) | 1991-05-20 |
Family
ID=30632036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8342085U Expired JPH0322910Y2 (ja�@�@) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322910Y2 (ja�@�@) |
-
1985
- 1985-06-04 JP JP8342085U patent/JPH0322910Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322910Y2 (ja�@�@) | 1991-05-20 |