JPS61198666A - Solid-state image pickup device - Google Patents
Solid-state image pickup deviceInfo
- Publication number
- JPS61198666A JPS61198666A JP60037858A JP3785885A JPS61198666A JP S61198666 A JPS61198666 A JP S61198666A JP 60037858 A JP60037858 A JP 60037858A JP 3785885 A JP3785885 A JP 3785885A JP S61198666 A JPS61198666 A JP S61198666A
- Authority
- JP
- Japan
- Prior art keywords
- region
- color
- regions
- area
- sensitivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000035945 sensitivity Effects 0.000 claims abstract description 21
- 230000003595 spectral effect Effects 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 7
- 238000002955 isolation Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000004043 dyeing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000003113 dilution method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 235000006732 Torreya nucifera Nutrition 0.000 description 1
- 244000111306 Torreya nucifera Species 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は色分解用カラーフィルタをもつ固体撮像素子に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a solid-state image sensor having a color filter for color separation.
C0D−?MO8などの固体撮像素子を1個あるいは2
個使用して構成されるカラーカメラにおいては、色分解
用の毫ザイク状あるいはストライプ状のカラーフィルタ
が使用される。C0D-? One or two solid-state image sensors such as MO8
In a color camera constructed using a single color filter, a screen-like or stripe-like color filter is used for color separation.
カラーフィルタは一般に、ガラスなどの透光性基板や固
体撮像素子上にゼラチン等の有機薄膜を染色層として形
成され、その各画素を固体撮像素子の感光部に位置合せ
し用いられている。Color filters are generally formed by using a dyed layer of an organic thin film such as gelatin on a transparent substrate such as glass or a solid-state image sensor, and are used by aligning each pixel with the photosensitive area of the solid-state image sensor.
カラーフィルタとしては、各画素を赤(fL)、f(B
)、緑(G)の原色系で構成するもの、または、シアン
(Cy)、黄(Ye)、マゼンタ(Mg)及び白(W)
の補色系で構成するものが用いられているが、色分解能
及び分光感jft高めるために、1画素から2種類以上
の色信号が得られる画素を複数個形成して用いる場合が
ある。As a color filter, each pixel is colored red (fL), f(B
), consisting of the primary colors of green (G), or cyan (Cy), yellow (Ye), magenta (Mg) and white (W)
However, in order to improve color resolution and spectral sensitivity, a plurality of pixels from which two or more types of color signals can be obtained from one pixel may be formed and used.
カラーフィルタのio!j素から2株類以上の色信号を
得る方法としては1例えば、第6図tこ示すように、l
#jJ素2を2つに分割し2fli類の色領域21.2
2を形成する方法(分割法)や、1画素全体の染色層の
濃度を薄くし結果としてWを混色する方法(希釈法)が
用いられている。Color filter io! As a method for obtaining color signals of two or more classes from element j, for example, as shown in Figure 6,
#jJ element 2 is divided into two and the color area of 2fli class 21.2
2 (division method), and a method of reducing the density of the dyed layer of the entire pixel and mixing W as a result (dilution method).
しかしながら1分割法においては、染色マスクの位置合
せが必要であシしかもその誤差が大きいため、面積比の
正確な2つの色領域を形成するのが困難である。すなわ
ち、面積比が1〜2チ狂うと色彩が異なり、再現性の良
い均一な画素が得られないという欠点がある。However, in the one-division method, it is necessary to align the dyeing masks, and the error is large, so it is difficult to form two color regions with accurate area ratios. That is, if the area ratio is off by 1 to 2 inches, the color will be different and uniform pixels with good reproducibility cannot be obtained, which is a drawback.
また、希釈法においては、染色層の濃度は、用いる染料
溶液の濃度、染色時間、温度等により定まるため、ばら
つきが大きく、再現性が悪いという欠点がある。Furthermore, in the dilution method, the concentration of the dyed layer is determined by the concentration of the dye solution used, dyeing time, temperature, etc., and therefore has the drawback of large variations and poor reproducibility.
本発明の目的は、1画素中に面積比の正確な少なくとも
2撞類の色領域を有する画素を複数個有し、任意の分光
感度特性を容易に得ることのできるカラーフィルタを提
供することにある。An object of the present invention is to provide a color filter that has a plurality of pixels having at least two types of color regions with accurate area ratios in one pixel and can easily obtain arbitrary spectral sensitivity characteristics. be.
更に1本発明の他の目的は、任意の分光感度特性を有す
るカラーフィルタを備え、分解能及び感度の向上した固
体撮像素子を提供することにある。Still another object of the present invention is to provide a solid-state imaging device that is equipped with a color filter having arbitrary spectral sensitivity characteristics and has improved resolution and sensitivity.
本発明のカラーフィルタは、同一画素内に分光感度特性
の異なる少なくとも2穐類の色領域を有する画素を複数
個含むカラーフィルタであって、前記色領域のうち第1
の色領域の全外周が第2の色領域により囲まれているも
のである。The color filter of the present invention is a color filter including a plurality of pixels having at least two color regions having different spectral sensitivity characteristics in the same pixel, and wherein a first color region of the color region
The entire outer periphery of the color area is surrounded by the second color area.
また、本発明の固体撮像素子は、同一画素内に分光感度
特性の異なる少なくとも2種類の色領域を有し、かつ第
1の色領域の全外周が他の第2の色領域により囲まれて
いる画素を複数個含んでなるカラーフィルタを備えて構
成される。Further, the solid-state image sensor of the present invention has at least two types of color regions having different spectral sensitivity characteristics within the same pixel, and the entire outer periphery of the first color region is surrounded by another second color region. The color filter includes a plurality of pixels.
次に本発明の実施例を図面を用いて説明する。 Next, embodiments of the present invention will be described using the drawings.
第1図は本発明のカラーフィルタの一実施例の平面図で
ある。FIG. 1 is a plan view of an embodiment of the color filter of the present invention.
第1図において、カラーフィルタ1は、着色された染色
層からまる色領域が形成された画素2が縦横に配列され
ており、その間に染色されていない分離領域3が形成さ
れている。そして画素2の一部2a、 2b、2Cは
2fl類の色領域から形成されている。In FIG. 1, in a color filter 1, pixels 2 each having a colored region formed from a colored dyed layer are arranged in a vertical and horizontal manner, and an undyed separation region 3 is formed between them. Parts 2a, 2b, and 2C of the pixel 2 are formed from 2fl color areas.
几領域とW領域からなる画素2aiCおいては、W領域
の全外周は几領域により囲まれている。すなわち、W領
域は几領域の中に一定の面積で形成されておればよく、
その位置は特に規定する必要はない。従ってW領域形成
の為の正確なマスク合わせは不要である。In the pixel 2aiC, which is composed of a solid area and a W area, the entire outer periphery of the W area is surrounded by the solid area. In other words, it is sufficient that the W region is formed with a certain area within the region,
There is no need to specify its position. Therefore, accurate mask alignment for forming the W region is not necessary.
几領域とW領域の面積は、画素2及び几領域形成の為の
マスクの精度によって定る。従って、従来の分割法に比
べ任意の面積比で2種類の色領域を精度よく、容易に形
成することができる。The areas of the narrow region and the W region are determined by the precision of the mask for forming the pixel 2 and the narrow region. Therefore, compared to conventional dividing methods, two types of color regions can be formed easily and accurately with arbitrary area ratios.
W領域を設ける方法としては、例えば、W領域をマスク
し着色しない状態(透明)のカラーフィルタを形成する
か、画素全体を几、 G、 B等で形成したのち、W
領域を形成する部分を打ち抜き又はエツチングにより除
去してW領域とすることも可能である。The W area can be provided by, for example, masking the W area and forming an uncolored (transparent) color filter, or forming the entire pixel with phosphor, G, B, etc., and then forming the W area.
It is also possible to remove the portion forming the region by punching or etching to form the W region.
尚、2種類の色領域の組み合せ及びその面積比は任意に
選ぶことができるため、カラーフィルタの分光感度特性
を容易Vこ制御することができる。Incidentally, since the combination of the two types of color regions and the area ratio thereof can be arbitrarily selected, the spectral sensitivity characteristics of the color filter can be easily controlled.
第2図は、第1図の画素2aにおけるB、 G。FIG. 2 shows B and G at the pixel 2a in FIG.
几の感度を説明するための図である。FIG.
画素2aに示したように几領域にW@域を設けたことに
より光量が増加すると共に、几信号の他に斜線を付し九
B、 G、 Rの色信号がW領域の面積に比例した感度
で得られる。従って、感度及び解像度の向上したカラー
フィルタが得られる。As shown in pixel 2a, the amount of light is increased by providing the W@ area in the 几 area, and the color signals of 9B, G, and R, which are shaded in addition to the 几 signal, are proportional to the area of the W area. Obtained by sensitivity. Therefore, a color filter with improved sensitivity and resolution can be obtained.
第3図は本発明のカラーフィルタの他の実施例の平面図
であシ、1画素2(12種類の補色領域(Cy、Ye)
で形成した場合を示している。FIG. 3 is a plan view of another embodiment of the color filter of the present invention, in which 1 pixel 2 (12 types of complementary color areas (Cy, Ye))
This shows the case where it is formed.
Ye領領域cy領域中に比較的小さな面積比で形成され
ており、これら領域から得られる色の感度は第4図に示
すとおシとなる。すなわちscY領域によるB、 G信
号の外、Ye領領域ら斜線で示し九G、几信号が得られ
るため、第1図の場合と同様に、解像度及び感度の向上
したカラーフィルタが得られる。They are formed with a relatively small area ratio in the Ye region cy region, and the color sensitivity obtained from these regions is as shown in FIG. That is, in addition to the B and G signals from the scY region, the 9G and 3 signals shown by diagonal lines are obtained from the Ye region, so that a color filter with improved resolution and sensitivity can be obtained, as in the case of FIG. 1.
Cy及びYe領領域形成は、ガラス等の透明基板上に設
けられた染色層を染め分ける周知の技術により容易に行
うことができる。Cy and Ye regions can be easily formed using a well-known technique of separately dyeing a dyed layer provided on a transparent substrate such as glass.
第5図は本発明の固体撮像素子の一実施例の断面図であ
る。FIG. 5 is a sectional view of an embodiment of the solid-state image sensing device of the present invention.
第5図において、固体撮像素子10は、例えば、感光部
11.電荷転送部等から々る非感光部12を有するCO
D素子13と、このCCL)素子上に目合わせして貼シ
合わされた力2−フィルタ1とから構成されている。カ
ラーフィルタ1は第1図の場合と同様に作られている。In FIG. 5, the solid-state image sensor 10 includes, for example, a photosensitive section 11. CO having a non-photosensitive part 12 coming from a charge transfer part etc.
It consists of a D element 13 and a force 2-filter 1 which is aligned and laminated onto this CCL) element. The color filter 1 is made in the same way as in FIG.
すなわち、同一画素2Cは几領域とW領域とから形成さ
れており、しかもW領域の全外周は几領域により囲まれ
ている。尚4はガラス基板である。That is, the same pixel 2C is formed from a hollow area and a W area, and the entire outer periphery of the W area is surrounded by the hollow area. Note that 4 is a glass substrate.
このように本発明の実施例によれば、固体撮像素子10
は、1画素に211[類の色領域を有する画素を複数個
含むカラーフィルタを備えているため。As described above, according to the embodiment of the present invention, the solid-state image sensor 10
This is because one pixel includes a color filter including a plurality of pixels having color regions of 211 [classes].
任意の分光感度を有する固体撮像素子が得られる。A solid-state imaging device having arbitrary spectral sensitivity can be obtained.
以上詳細に説明したように%本発明によれば、1画素中
に面積比の正確な2楕類の色領域を有する画素を複数個
有し、任意の分光感度特性を有するカラーフィルタ及び
該カラーフィルタを備え、分解能と感度の向上した固体
撮像素子が得られるのでその効果は大きい。As described above in detail, the present invention provides a color filter having a plurality of pixels each having two ellipsoidal color regions with accurate area ratios in one pixel and having arbitrary spectral sensitivity characteristics; The effect is great because a solid-state imaging device equipped with a filter and with improved resolution and sensitivity can be obtained.
第1図は本発明のカラーフィルタの一実施例の平面図、
第2図は第1図の1画素の分光感度を説明するための図
、第3図は本発明のカラーフィルタの他の実施例の平面
図、第4図は第3図の1画素の分光感度を説明するため
の図、第5図は本発明の固体撮像素子の一実施例の断面
図、第6図は従来のカラーフィルタの一例の平面図でお
る。
1・・・・・・カラーフィルタ、2・・・・・・画素、
3・・・・・・分離領域、4・・・・・・ガラス基板、
10・・・・・・固体撮像素子、11・・・・・・感光
部、12・・・・・・非感光部、13・・・・・・CC
D素子、21.22・・・・・・色領域。
茅1別
3fR
(↑] (詐)[8)
BQF?
e
′嘗ら乙−bン]
色禮域゛FIG. 1 is a plan view of an embodiment of the color filter of the present invention;
Fig. 2 is a diagram for explaining the spectral sensitivity of one pixel in Fig. 1, Fig. 3 is a plan view of another embodiment of the color filter of the present invention, and Fig. 4 is a diagram for explaining the spectral sensitivity of one pixel in Fig. 3. FIG. 5 is a cross-sectional view of an embodiment of the solid-state image sensing device of the present invention, and FIG. 6 is a plan view of an example of a conventional color filter. 1...Color filter, 2...Pixel,
3...Separation area, 4...Glass substrate,
10... Solid-state image sensor, 11... Photosensitive section, 12... Non-photosensitive section, 13... CC
D element, 21.22...color area. Kaya 1 separate 3fR (↑) (Fraud) [8] BQF? e ′嘗ra-bun] Colorful range゛
Claims (1)
色領域を有し、かつ第1の色領域の全外周が第2の色領
域により囲まれている画素を含んでなるカラーフィルタ
を備えていることを特徴とする固体撮像装置。The color filter includes a pixel that has at least two types of color regions having different spectral sensitivity characteristics within the same pixel, and the entire outer periphery of the first color region is surrounded by the second color region. A solid-state imaging device characterized by:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60037858A JPS61198666A (en) | 1985-02-27 | 1985-02-27 | Solid-state image pickup device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60037858A JPS61198666A (en) | 1985-02-27 | 1985-02-27 | Solid-state image pickup device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61198666A true JPS61198666A (en) | 1986-09-03 |
Family
ID=12509243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60037858A Pending JPS61198666A (en) | 1985-02-27 | 1985-02-27 | Solid-state image pickup device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61198666A (en) |
-
1985
- 1985-02-27 JP JP60037858A patent/JPS61198666A/en active Pending
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