JPS61197851A - Speed increase/decrease mechanism - Google Patents

Abstract

PURPOSE:To achieve high speed increase/decrease ratio compactly by constructing such that the motion of any one of the movable sections will cause motion of other movable sections. CONSTITUTION:Upon motion of movable rack 11 to the right through a piston 1, small pinion 7 for movable rack 11 will start to move in same direction over the movable rack 11. Since large pinion 8 integral with small pinion 7 is geared with the fixed rack 12, such force as to move the fixed rack 12 to the right will function and the reaction will function onto the large pinion 8. Consequently, the large pinion 8 will rotate clockwise to move the integrally formed pinions 7, 8 and a supporting carriage 9 to the right.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an acceleration/deceleration mechanism used for conveyance, etc.

[Conventional technology]

A conventional speed increase/decrease mechanism is shown in FIG. In the figure, 1'' is a piston, which is used to move a pinion 2 consisting of a small pinion 2a with a radius r and a large pinion 2b integral with the small pinion 2a with a radius R on the same axis. 3 is a piston. A fixed rack that meshes with the small pinion 2a and is fixed to the main body of the apparatus, and the small pinion 2a is transferred over the fixed rack 3. 5 meshes with the upper enlarged pinion 2b and is parallel to the fixed rack 3. and a movable rack disposed so as to be movable in that direction.

Next, the operation of the above conventional mechanism will be explained.

When the pinion 2 is moved to the right in the figure by the piston 1, the small pinion 2a moves on the fixed rack 3 while meshing with it, and at the same time, the large pinion 2b moves together with the small pinion 2a since it is integrated with the small pinion 2a. At this time, the movable rack 5 is moved by rotationally engaged teeth. Here, the movement i1L of the movable rack 5 when the pinion 2 rotates N times on the fixed rack 3 and its axis moves l to the right is L=2NπR+I! (N-number of rotations), and the movement ill of the pinion 2 is 1-2Nπr. Therefore, at this time, this conventional mechanism becomes a speed increasing mechanism,
Its speed increasing ratio is NW r .

Further, when the amount of movement of the movable rack 5 is input and the output is the amount of movement l of the axis of the pinion 2, it becomes a reduction mechanism, and its reduction ratio becomes.

[Problems to be Solved by the Invention] In order to obtain a large acceleration/deceleration ratio with the above conventional mechanism, it is possible to increase the difference in diameter between the large pinion and the small pinion.
All you have to do is make the large pinion larger or the small pinion smaller, but there is a limit to manufacturing small gears, so the large pinion has to be made larger, and in the end, conventional mechanisms cannot handle large increases/decelerations. The problem was that a certain amount of space was required to obtain the ratio.

In order to solve the above-mentioned conventional problems, the present invention has a structure completely different from the conventional one that can obtain a large acceleration/deceleration ratio without requiring an increase in size or a large space. The purpose is to obtain an acceleration/deceleration mechanism.

Means for Solving Problem c] The speed increasing/decelerating mechanism according to the present invention has a small diameter first and a large diameter first and second
A first drive member and a second drive member are provided on the same side of a rotating body having a rotating portion, and the first drive member and the second drive member are respectively provided on the same side of the rotating body having a rotating portion. The second rotating section is rotatably arranged parallel to each other, and the second rotating section and the first rotating section are rotatably arranged parallel to each other. Any two of the second drive members are movable in the direction of the drive member,
The remaining one is fixed.

[Effect]

In the acceleration/deceleration mechanism according to the present invention, when any one of the movable parts is moved in the above direction, the other movable parts are accelerated or decelerated and moved in that direction,
In this case, the increase/deceleration ratio is the ratio of the diameter of the large-diameter rotating section and the difference between the diameters of the large-diameter and small-diameter rotating sections.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the present invention, and in the figure, 6 is a first . The second rotating part is a pinion having a small and large pinion 7°8, each of which has a radius r.
, R are formed integrally and coaxially with each other, and this pinion 6 is rotatably supported by a carriage 9 by a support shaft 9a, and the carriage 9 is supported by a support rod 1.
o is movably supported in the horizontal direction. Also 1
1° and 12 are respectively the 1st. A second driving member is a movable and fixed rack, and the movable and fixed racks 11 and 12 are disposed in parallel with each other below the pinion 6 and mesh with the small and large pinions 8, respectively. In addition, the movable rack 11 is movable in the horizontal direction, and the piston 1
is driven linearly in the horizontal direction.

Next, the operation will be explained.

In FIG. 1, when the movable rack 11 is moved to the right in the figure by the piston 1, the small pinion for the movable rack 11 rides on the movable rack 11 and tries to move in the same direction. However, in this case, since the large pinion 8, which is integrated with the small pinion, is engaged with the fixed rack 12, a force is exerted to move the fixed rack 12 to the right, and since the fixed rack 12 is fixed, A reaction force of the force trying to move the fixed rack 12 to the right acts on the large pinion 8, and as a result, the large pinion 8 rotates clockwise, and the integrally formed small and large pinion 8 and these The carriage 9 that supports the moves to the right.

To explain this state using a specific example as shown in FIGS. 2ad and 1(b), when the pinion 6 rotates once, for example, the amount of movement of the large pinion 8 is L-2πR. Here, since the small pinion shaft and the large pinion 8 are integrated, the amount of movement of both is naturally the same, so the amount of movement of the movable rack 11 is calculated as follows. Then, 2πR=2πr+l. When this equation is transformed into an equation for the amount of movement of the movable rack 11, f-2π
(R-r), therefore, the movement amount l of the movable rack 11
The ratio of the amount of movement of the pinion 6 to the amount of movement of the pinion 6 is 2π(R-r)R-r, and the mechanism of this embodiment becomes a speed increasing mechanism. Furthermore, if the carriage 9 is moved by L and the movement of the movable rack 11 at this time [1 is taken as an output, -r l/L=-, and the mechanism of this embodiment becomes a deceleration mechanism.

In this way, in this embodiment, the possible racks 11. Since the fixed racks 12 are engaged with the small and large pinions 8 on the same side of the pinion 6, when the movement of the movable rack 11 is used as an input, it becomes a speed increasing mechanism, and when the movement of the pinion 6 is used as an input, it becomes a deceleration mechanism. mechanism, and in this case, the increase/deceleration ratio is small.

It is determined by the ratio of the radius difference R-r of the large pinion 8 to the radius R of the large pinion 8, and a compact speed-up/down mechanism with a large speed-up/speed-down ratio can be obtained.

The mechanism of the above embodiment can be used as a speed reduction mechanism, for example, in a fine positioning device in semiconductor manufacturing equipment, and as a speed increase mechanism, it can be used in a measuring device.

In the above embodiment, the movable rack 11 was linearly moved by the piston 1, but the driving means for the movable rack 11 is not limited to the piston, and for example, a rack and pinion mechanism different from the rack and pinion shown in FIG. A similar effect can be obtained by moving in a straight line.

In addition, in the above embodiment, the rack 1 meshed with the small pinion
1 was made movable, but on the contrary, rack 11 was fixed,
The rack 12 meshed with the large pinion 8 may be made movable. In this case, if the amount of movement of the rack 12 is input, it becomes a speed increasing mechanism, and conversely, if the amount of movement of pinion 6 is input, it becomes a deceleration mechanism. In this case, the rack and pinion move in opposite directions.

Furthermore, in the above embodiment, the rotating body and the driving member are a pinion and a rack, respectively, and the case is explained in which they are in mesh with each other, but these do not necessarily need to be in mesh with each other. In this case, it is possible to obtain an even larger acceleration/deceleration ratio than in the case of the above-mentioned rack and pinion.

〔Effect of the invention〕

According to the acceleration/deceleration mechanism according to the present invention, the small diameter and large diameter first
．． The first rotor is located on the same side of the rotating body as having the second rotary part. The second drive members are connected to the first and second drive members respectively. The second rotating section is rotatably arranged parallel to each other, and the second rotating section and the first rotating section are rotatably arranged parallel to each other. Since one of the second drive members is fixed and the remaining two are movable in a predetermined direction, a large acceleration/deceleration ratio can be obtained by simply reducing the difference in diameter between the two rotating parts. This has the effect of making the device more compact without requiring a large space.

[Brief explanation of the drawing]

FIG. 1 is a side view of an increasing/decelerating mechanism according to an embodiment of the present invention;
2(al) and 2(b) are side views for explaining its operation, and FIG. 3 is a side view of a conventional speed-up/deceleration mechanism. In the figures, 6 is a pinion, 7 is a small pinion (first pinion) ), 8 is a large pinion (second pinion), 11 is a movable rack (first rack), and 12 is a fixed rack (second rack). In addition, the same reference numerals in the figures indicate the same or equivalent parts. 1 Figure 6: I:'2λn7°ノ11 Bininon 8:λL°:tn11:a7#Ushio12: m;εU,2 2nd m

Claims (3)

[Claims] (1) A rotating body having a first rotating part and a second rotating part having a larger diameter is rotatably arranged, and a linear first driving member extending in a predetermined direction rotationally drives the first rotating part. A second driving member is provided on the first driving member side of the rotating body in parallel with the first driving member and is capable of rotationally driving the second rotating part, and 1. An acceleration/deceleration mechanism characterized in that any two of the second drive members are movable in the predetermined direction, and the remaining one is fixed. (2) The first and second rotating parts of the rotating body are first and second pinions, and the first and second driving members are respectively disposed in the horizontal direction and mesh with the first and second pinions, respectively. The speed increasing/decelerating mechanism according to claim 1, wherein the rotating body and the first rack are movable, and the second rack is fixed. . (3) The first and second rotating parts of the rotary body are first and second friction wheels, and the first and second drive members are arranged in a horizontal direction, and are respectively the first and second friction wheels. Claim 1, characterized in that the first and second friction plates are in contact with each other, the rotating body and the first friction plate are movable, and the second friction plate is fixed. Increase/decelerate mechanism.