JP2513346Y2 - Stage fine movement device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a stage fine movement device suitable for a microscope for inspecting and observing a large sample.

[Conventional technology]

As one of the conventional stage fine movement devices, an XY stage fine movement device for a microscope, for example, is configured as follows.
FIG. 4 is a plan view thereof, FIG. 5 is a perspective view of an essential part of FIG. 4, and FIG. 6 is a sectional view taken along the line VI-VI of FIG.

In the figure, 1 is a fixed base, 2 is a Y stage mounted on the fixed base 1 via the ball guide 3 so as to be movable in the Y direction, and 4 is movable on the Y stage 2 via the ball guide 5 in the X direction. It is an X stage mounted on. 6 is a rack in the Y direction fixed to the fixed base 1, 7 is an X stage 4
It is a rack in the X direction fixed to the rack. 9 is Y stage 2
Is an XY fine movement handle attached to an L-shaped support member 10 fixed to the lower surface of the support member, which includes a separation ring 11 screwed to the support member 10 and a separation ring as shown in FIG. A pinion shaft 12 rotatably passing through the center hole 11 and having an upper end formed with a pinion 12a meshing with the rack 7 in the X direction, and a lower end provided with an X-direction fine movement handle 12b fixed by screws.
And a pinion that is rotatably fitted to the central outer periphery of the separation ring 11 and meshes with the rack 6 in the Y direction at the upper end.
The pinion shaft 13 has a lower end 13a and a Y direction fine movement handle 13b formed at the lower end, and a nut 8 screwed to the lower end of the separation ring 11 to prevent the pinion shaft 13 from coming off. ing.

[Problems to be solved by the device]

However, such a stage fine movement device can be used for racks 6, 7
It is necessary to make the length of each of the strokes of stage 2 and 4 plus a margin, so that racks 6 and 7 may protrude to the outside of stages 2 and 4 depending on the setting position of XY fine movement handle 9. If the XY fine movement handle 9 is provided on the front side of the stages 2 and 4, the rack 6 projects in the front-rear direction (Y direction) to hinder the operator, or the XY fine movement handle 9 is placed on the left or right side of the stages 2 and 4. However, there is a problem that the rack 7 projects in the left or right direction (X direction) and the left or right space of the microscope is wasted. If these problems are taken into consideration, there is a problem that the setting position of the XY fine movement handle 9 is restricted. In addition, the racks 6 and 7 project outside the respective stages 2 and 4, which causes a problem that the occupied area of the entire stage increases. In particular, when it comes to a microscope stage for inspecting and observing large samples such as glass substrates for liquid crystals, which have been actively produced in recent years, a stroke of 400 mm or more is required in front, rear, left and right, and racks 6, 7 These problems were extremely serious because the protrusion from the stages 2 and 4 became extremely large and the position of the XY fine movement handle 9 had to be on the front side so that it could be reached. In addition, since the lengths of the racks 6 and 7 must be set to lengths that add a margin to the strokes of the stages 2 and 4, respectively, the area occupied by the drive unit composed of the racks 6 and 7 and the XY fine movement handle 9 becomes large. However, there is a problem that the entire device becomes large. In addition, the racks 6 and 7 and the pinions 12a and 13a are increased due to the larger stages 2 and 4 accompanying the larger sample
Load on racks 6, 7 and pinion 12
The durability of drive parts such as a and 13a is also becoming a problem.

In view of the above problems, the present invention is a stage in which there is no protrusion of constituent members to the outside of the stage, there is freedom in the setting position of the XY fine movement handle, the entire device is compact, and the durability of the drive unit is also improved. It is intended to provide a fine movement device.

[Means for solving the problem]

The stage fine movement device according to the present invention is a stage fine movement device provided with a fine movement handle pivotally attached to one of a fixed side member and a stage movably attached to the fixed side member in a predetermined direction to finely move the stage. In, the toothed pulley is fixed to the shaft portion of the fine movement handle, and the reversing pulley is pivotally attached to one of the fixed side member and the stage where the fine movement handle is pivotally attached, and the toothed pulley and the inversion are It is characterized in that toothed belts are wound around the pulleys in opposite directions and meshed with each other, and both ends of the toothed belt are fixed to one of the stationary member and the stage where the fine movement handle is not pivotally attached.

[Action]

That is, according to the above configuration, the drive unit includes a toothed pulley fixed to the shaft portion of the XY fine movement handle pivotally attached to one of the fixed member and the stage, a reversing pulley, and a toothed pulley and a reversing pulley. Since they are made up of the fixed side members and the toothed belts whose both ends are fixed to the other side of the stage, they can be installed inside the stage. Therefore, there is no protrusion of the constituent members to the outside of the stage. As a result, the constituent members do not obstruct the operator, the left or right space of the microscope is wasted, and the setting position of the XY fine movement handle is not restricted. Further, since the toothed belt wound around the toothed pulley and the reversing pulley has a folded structure, the range occupied by the drive unit, that is, the occupied distance between the toothed pulley and the reversing pulley is about half the stroke of the stage. Can be
Further, since the toothed belt is flexible, it can be freely routed by adding a guide pulley. Therefore, the drive unit can be incorporated in a dead space such as a peripheral portion of the device, so that the opening of the stage can be enlarged and the entire device can be made compact. Further, since the toothed belt meshes with the toothed pulley by winding up to about half a turn, the number of meshing teeth is overwhelming compared to the meshing relationship between the rack and the pinion that meshes with only one or two teeth in a moment. As a result, the load on each tooth is reduced, so
Durability is greatly improved. Also, the transmission loss is reduced.

〔Example〕

Hereinafter, based on the illustrated embodiment, the same reference numerals are given to the same members as those in the conventional example, and the present invention will be described in detail.

1 and 2 are plan views of a Y stage and an X stage of a first embodiment of a stage fine movement device according to the present invention, respectively.

In FIG. 1, 14 is a pinion shaft 13 of the XY fine movement handle 9 attached to the Y stage 2 and a pinion 13
A toothed pulley fixed instead of a, a reversing pulley 15 pivotally mounted on the Y stage 2 at a distance d _Y corresponding to about half the stroke of the Y stage 2, 16 a fixed base 1
Numeral 17 is a toothed belt which is fixed to the toothed pulley 14 and the reversing pulley 15 in opposite directions and is meshed with the toothed pulley 14 and the reversing pulley 15 in opposite directions. .

In FIG. 2, reference numeral 18 denotes a pinion 12 attached to the pinion shaft 12 of the XY fine movement handle 9 attached to the Y stage 2.
A toothed pulley fixed instead of a, 19 is a reversing pulley pivotally attached to the Y stage 2 at a distance d _X which corresponds to about half the stroke of the X stage 4, and 20 is the X stage 4
An arm portion 21 fixedly attached to the toothed pulley 21 is meshed with the toothed pulley 18 and the reversing pulley 19 in opposite directions to each other, and one end of the arm portion 21 is X-shaped.
The toothed belt has the other end fixed to the arm 20 on the stage 4.

Since this embodiment is constructed as described above, the toothed pulley 14 is first moved by the Y direction fine movement handle 13b (Fig. 6).
In the figure, if the toothed pulley 14 is turned clockwise, the action of the toothed pulley 14 and the toothed belt 17 causes the Y stage 2 to move in the direction in which the distance between the toothed pulley 14 and the arm 16 is shortened, that is, in the upward direction, as shown by the chain line. At this time, the toothed pulley 14 and the reversing pulley 15 also move together with the Y stage 2. If the toothed pulley 14 is turned counterclockwise in FIG. 1, the toothed pulley 14
And by the action of the toothed belt 17, as shown by the chain line
The Y stage 2 moves in the direction in which the distance between the toothed pulley 14 and the arm portion 16 extends, that is, in the downward direction, and at this time, the toothed pulley 14 and the reversing pulley 15 also move together with the Y stage 2.

If the toothed pulley 18 is turned clockwise in FIG. 2 by the X-direction fine movement handle 12b (FIG. 6), the toothed pulley 18 and the toothed belt 21 act to cause the toothed pulley 18 to rotate as shown by the chain line. The X stage 4 moves in the direction in which the distance between the pulley 18 and the arm 20 is reduced, that is, in the right direction. In this case, the toothed pulley
18 and the reversing pulley 19 do not move with the X stage 4. If the toothed pulley 18 is turned counterclockwise in FIG. 2, the action of the toothed pulley 18 and the toothed belt 21 causes the distance between the toothed pulley 18 and the arm portion 20 to extend as shown by the chain line. That is, the X stage 4 moves to the left, and in this case, the toothed pulley 18 and the reversing pulley 19 do not move together with the X stage 4.

The operation principle of the present embodiment has been described above. However, in the present embodiment, the Y stage drive unit includes the toothed pulley 14 fixed to the pinion shaft 13 of the XY fine movement handle 9 attached to the Y stage 2 and the reversing pulley. 15 and a toothed belt 17 that is meshed with the toothed pulley 14 and the reversing pulley 15 in opposite directions to each other and has both ends fixed to the fixed base 1 side. 2, the toothed pulley 18 fixed to the pinion shaft 12 of the XY fine movement handle 9, the reversing pulley 19, and the toothed pulley 18 and the reversing pulley 19 are meshed in opposite directions to each other and both ends are X-shaped. Since the toothed belt 21 is fixed to the stage 4 side, they can all be installed inside the Y stage 2 or the X stage 4.
Therefore, there is no protrusion of the constituent members to the outside of the stage.
As a result, the components may interfere with the operator, the left or right space of the microscope may be wasted, and the XY
There is no restriction on the setting position of the fine movement handle 9. In addition, since the toothed belts 17 and 21 that are wound and meshed with the toothed pulley 14 and the reversing pulley 15 or the toothed pulley 18 and the reversing pulley 19 respectively have a folded structure, the range occupied by each drive unit, that is, the toothed belt The occupying distance d _Y between the pulley 14 and the reversing pulley 15 or the occupying distance d _X between the toothed pulley 18 and the reversing pulley 19 are respectively set to the Y stage 2
Alternatively, it can be about half the stroke of the X stage 4. Therefore, each drive unit can be incorporated into a dead space such as a peripheral portion of the device, so that the opening of the stage can be enlarged and the entire device can be made compact. Further, since the toothed belts 17 and 21 mesh with the toothed pulleys 14 and 18 respectively up to about half a turn, compared to the meshing relationship between the rack and the pinion that only momentarily meshes with one or two teeth. The number of teeth that mesh with each other becomes overwhelmingly large, and as a result, the load applied to each tooth is reduced, and durability is greatly improved. Also, the transmission loss is reduced.

FIG. 3 is a plan view of the X stage of the second embodiment,
This is a new guide pulley that is pivotally attached to the Y stage 2.
22 is added and the toothed belt 21 is drawn around the periphery of the Y stage 2. According to this embodiment, the opening of the stage can be made larger and the entire apparatus can be made more compact.

[Effect of device]

As described above, the stage fine movement device according to the present invention has no protrusion of the constituent members to the outside of the stage, the degree of freedom in setting the XY fine movement handle, the entire device is compact, and the durability of the drive unit is also improved. It has an important practical advantage.

[Brief description of drawings]

1 and 2 are plan views of the Y stage and X stage of the first embodiment of the stage fine movement device according to the present invention, FIG. 3 is a plan view of the X stage of the second embodiment, and FIG. FIG. 5 is a plan view of an example, FIG. 5 is a perspective view of an essential part of FIG. 4, and FIG. 6 is a sectional view taken along line VI-VI of FIG. 1 ... Fixed base, 2 ... Y stage, 3,5 ... Ball guide, 4 ... X stage, 9 ... XY fine movement handle, 12
b …… X direction fine movement handle, 13b …… Y direction fine movement handle, 14,18 …… Toothed pulley, 15,19 …… Reverse pulley,
16,20 …… Arm, 17,21 …… Toothed belt, 22 …… Guide pulley.

Claims (1)

(57) [Scope of utility model registration request] 1. A stage fine movement apparatus provided with a fine movement handle pivotally attached to one of a fixed side member and a stage movably mounted in the fixed side member in a predetermined direction to finely move the stage, A toothed pulley is fixed to the shaft portion of the fine movement handle, and an inversion pulley is pivotally attached to one of the fixed side member and the stage on which the fine movement handle is pivotally attached, and the toothed pulley and the inversion pulley are mutually attached. A stage fine movement device comprising a toothed belt wound in a reverse direction and meshed with each other, and both ends of the toothed belt are fixed to one of the fixed side member and the stage where the fine movement handle is not pivotally attached.