JPS61197551U - - Google Patents

Info

Publication number

JPS61197551U

JPS61197551U JP7998785U JP7998785U JPS61197551U JP S61197551 U JPS61197551 U JP S61197551U JP 7998785 U JP7998785 U JP 7998785U JP 7998785 U JP7998785 U JP 7998785U JP S61197551 U JPS61197551 U JP S61197551U

Authority

JP

Japan

Prior art keywords

base material

electrodes

gas sensor

semiconductor layer

main component

Prior art date

1985-05-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000463 material Substances 0.000 claims description 4
• 239000003054 catalyst Substances 0.000 claims description 3
• 239000000919 ceramic Substances 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 4
• 229910052763 palladium Inorganic materials 0.000 claims 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
• 229910003437 indium oxide Inorganic materials 0.000 claims 1
• PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 8
• 238000001514 detection method Methods 0.000 description 2
• 238000004140 cleaning Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1