JPS61197427U - - Google Patents

Info

Publication number
JPS61197427U
JPS61197427U JP7970885U JP7970885U JPS61197427U JP S61197427 U JPS61197427 U JP S61197427U JP 7970885 U JP7970885 U JP 7970885U JP 7970885 U JP7970885 U JP 7970885U JP S61197427 U JPS61197427 U JP S61197427U
Authority
JP
Japan
Prior art keywords
clean
area
room
air outlet
blowing out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7970885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512669Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985079708U priority Critical patent/JPH0512669Y2/ja
Publication of JPS61197427U publication Critical patent/JPS61197427U/ja
Application granted granted Critical
Publication of JPH0512669Y2 publication Critical patent/JPH0512669Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1985079708U 1985-05-28 1985-05-28 Expired - Lifetime JPH0512669Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985079708U JPH0512669Y2 (cs) 1985-05-28 1985-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985079708U JPH0512669Y2 (cs) 1985-05-28 1985-05-28

Publications (2)

Publication Number Publication Date
JPS61197427U true JPS61197427U (cs) 1986-12-09
JPH0512669Y2 JPH0512669Y2 (cs) 1993-04-02

Family

ID=30624869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985079708U Expired - Lifetime JPH0512669Y2 (cs) 1985-05-28 1985-05-28

Country Status (1)

Country Link
JP (1) JPH0512669Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100483U (cs) * 1980-12-08 1982-06-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100483U (cs) * 1980-12-08 1982-06-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

Also Published As

Publication number Publication date
JPH0512669Y2 (cs) 1993-04-02

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