JPS61197427U - - Google Patents
Info
- Publication number
- JPS61197427U JPS61197427U JP7970885U JP7970885U JPS61197427U JP S61197427 U JPS61197427 U JP S61197427U JP 7970885 U JP7970885 U JP 7970885U JP 7970885 U JP7970885 U JP 7970885U JP S61197427 U JPS61197427 U JP S61197427U
- Authority
- JP
- Japan
- Prior art keywords
- clean
- area
- room
- air outlet
- blowing out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims 2
- 238000013459 approach Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079708U JPH0512669Y2 (cg-RX-API-DMAC10.html) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079708U JPH0512669Y2 (cg-RX-API-DMAC10.html) | 1985-05-28 | 1985-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61197427U true JPS61197427U (cg-RX-API-DMAC10.html) | 1986-12-09 |
| JPH0512669Y2 JPH0512669Y2 (cg-RX-API-DMAC10.html) | 1993-04-02 |
Family
ID=30624869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985079708U Expired - Lifetime JPH0512669Y2 (cg-RX-API-DMAC10.html) | 1985-05-28 | 1985-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512669Y2 (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002195636A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
| JP2002195620A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100483U (cg-RX-API-DMAC10.html) * | 1980-12-08 | 1982-06-21 |
-
1985
- 1985-05-28 JP JP1985079708U patent/JPH0512669Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100483U (cg-RX-API-DMAC10.html) * | 1980-12-08 | 1982-06-21 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002195636A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
| JP2002195620A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512669Y2 (cg-RX-API-DMAC10.html) | 1993-04-02 |