JPS61196564U - - Google Patents

Info

Publication number
JPS61196564U
JPS61196564U JP8008285U JP8008285U JPS61196564U JP S61196564 U JPS61196564 U JP S61196564U JP 8008285 U JP8008285 U JP 8008285U JP 8008285 U JP8008285 U JP 8008285U JP S61196564 U JPS61196564 U JP S61196564U
Authority
JP
Japan
Prior art keywords
gas
detection sensor
control system
control valve
oscillation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8008285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8008285U priority Critical patent/JPS61196564U/ja
Publication of JPS61196564U publication Critical patent/JPS61196564U/ja
Pending legal-status Critical Current

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  • Lasers (AREA)
JP8008285U 1985-05-30 1985-05-30 Pending JPS61196564U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8008285U JPS61196564U (enrdf_load_stackoverflow) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8008285U JPS61196564U (enrdf_load_stackoverflow) 1985-05-30 1985-05-30

Publications (1)

Publication Number Publication Date
JPS61196564U true JPS61196564U (enrdf_load_stackoverflow) 1986-12-08

Family

ID=30625597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8008285U Pending JPS61196564U (enrdf_load_stackoverflow) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPS61196564U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04120782A (ja) * 1990-09-12 1992-04-21 Hitachi Ltd ハロゲンガス注入型エキシマレーザ装置のハロゲンガス注入方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04120782A (ja) * 1990-09-12 1992-04-21 Hitachi Ltd ハロゲンガス注入型エキシマレーザ装置のハロゲンガス注入方法

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