JPS61196564U - - Google Patents
Info
- Publication number
- JPS61196564U JPS61196564U JP8008285U JP8008285U JPS61196564U JP S61196564 U JPS61196564 U JP S61196564U JP 8008285 U JP8008285 U JP 8008285U JP 8008285 U JP8008285 U JP 8008285U JP S61196564 U JPS61196564 U JP S61196564U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detection sensor
- control system
- control valve
- oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010355 oscillation Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Lasers (AREA)
Description
第１図と第２図は本考案実施例の断面図、第３
図は制御方法の説明図である。
１…発振ボツクス、１ａ…排気パイプ、１ｂ…
給気パイプ、５ａ，５ｂ…電極、６…放電空間、
７…紫外線発生部、８…全反射鏡、９…取出窓、
１１…調節弁、１２…ボンベ、１３…制御系、１
４…センサー。
Figures 1 and 2 are cross-sectional views of the embodiment of the present invention;
The figure is an explanatory diagram of the control method. 1...Oscillation box, 1a...Exhaust pipe, 1b...
Air supply pipe, 5a, 5b...electrode, 6...discharge space,
7... Ultraviolet generating part, 8... Total reflection mirror, 9... Exit window,
11...Control valve, 12...Cylinder, 13...Control system, 1
4...Sensor.
Claims (1)
よびガス検知センサーがその内部に配置された発
振ボツクスと、この発振ボツクス内に放電ガスを
充填するためのガス給気および排気パイプと、こ
のガス給気パイプ内のガス流量を調節する調節弁
とを備え、前記ガス検知センサーの出力信号を制
御系に入力し、この制御系の信号により前記調節
弁を制御することを特徴とするガスレーザ発振装
置。 An oscillation box in which a pair of elongated electrodes to which a pulsed high voltage is applied and a gas detection sensor are arranged; a gas supply and exhaust pipe for filling the oscillation box with discharge gas; A gas laser oscillation device comprising: a control valve that adjusts a gas flow rate in an air supply pipe; an output signal from the gas detection sensor is input to a control system; and the control valve is controlled by a signal from the control system. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8008285U JPS61196564U (en) | 1985-05-30 | 1985-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8008285U JPS61196564U (en) | 1985-05-30 | 1985-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196564U true JPS61196564U (en) | 1986-12-08 |
Family
ID=30625597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8008285U Pending JPS61196564U (en) | 1985-05-30 | 1985-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196564U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120782A (en) * | 1990-09-12 | 1992-04-21 | Hitachi Ltd | Halogen gas injection type stable output excimer laser device |
-
1985
- 1985-05-30 JP JP8008285U patent/JPS61196564U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120782A (en) * | 1990-09-12 | 1992-04-21 | Hitachi Ltd | Halogen gas injection type stable output excimer laser device |