JPS61196564U - - Google Patents
Info
- Publication number
- JPS61196564U JPS61196564U JP8008285U JP8008285U JPS61196564U JP S61196564 U JPS61196564 U JP S61196564U JP 8008285 U JP8008285 U JP 8008285U JP 8008285 U JP8008285 U JP 8008285U JP S61196564 U JPS61196564 U JP S61196564U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detection sensor
- control system
- control valve
- oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8008285U JPS61196564U (cs) | 1985-05-30 | 1985-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8008285U JPS61196564U (cs) | 1985-05-30 | 1985-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196564U true JPS61196564U (cs) | 1986-12-08 |
Family
ID=30625597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8008285U Pending JPS61196564U (cs) | 1985-05-30 | 1985-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196564U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120782A (ja) * | 1990-09-12 | 1992-04-21 | Hitachi Ltd | ハロゲンガス注入型エキシマレーザ装置のハロゲンガス注入方法 |
-
1985
- 1985-05-30 JP JP8008285U patent/JPS61196564U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04120782A (ja) * | 1990-09-12 | 1992-04-21 | Hitachi Ltd | ハロゲンガス注入型エキシマレーザ装置のハロゲンガス注入方法 |
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