JPS61196526U - - Google Patents
Info
- Publication number
- JPS61196526U JPS61196526U JP7926185U JP7926185U JPS61196526U JP S61196526 U JPS61196526 U JP S61196526U JP 7926185 U JP7926185 U JP 7926185U JP 7926185 U JP7926185 U JP 7926185U JP S61196526 U JPS61196526 U JP S61196526U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing
- pad
- cooling
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7926185U JPH0418197Y2 (https=) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7926185U JPH0418197Y2 (https=) | 1985-05-29 | 1985-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61196526U true JPS61196526U (https=) | 1986-12-08 |
| JPH0418197Y2 JPH0418197Y2 (https=) | 1992-04-23 |
Family
ID=30624009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7926185U Expired JPH0418197Y2 (https=) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418197Y2 (https=) |
-
1985
- 1985-05-29 JP JP7926185U patent/JPH0418197Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0418197Y2 (https=) | 1992-04-23 |