JPS61196247U - - Google Patents

Info

Publication number
JPS61196247U
JPS61196247U JP1985079143U JP7914385U JPS61196247U JP S61196247 U JPS61196247 U JP S61196247U JP 1985079143 U JP1985079143 U JP 1985079143U JP 7914385 U JP7914385 U JP 7914385U JP S61196247 U JPS61196247 U JP S61196247U
Authority
JP
Japan
Prior art keywords
alignment marks
pair
different
photomask
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985079143U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985079143U priority Critical patent/JPS61196247U/ja
Publication of JPS61196247U publication Critical patent/JPS61196247U/ja
Pending legal-status Critical Current

Links

JP1985079143U 1985-05-27 1985-05-27 Pending JPS61196247U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985079143U JPS61196247U (US06815460-20041109-C00097.png) 1985-05-27 1985-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985079143U JPS61196247U (US06815460-20041109-C00097.png) 1985-05-27 1985-05-27

Publications (1)

Publication Number Publication Date
JPS61196247U true JPS61196247U (US06815460-20041109-C00097.png) 1986-12-06

Family

ID=30623779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985079143U Pending JPS61196247U (US06815460-20041109-C00097.png) 1985-05-27 1985-05-27

Country Status (1)

Country Link
JP (1) JPS61196247U (US06815460-20041109-C00097.png)

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