JPS61195049U - - Google Patents
Info
- Publication number
- JPS61195049U JPS61195049U JP7863785U JP7863785U JPS61195049U JP S61195049 U JPS61195049 U JP S61195049U JP 7863785 U JP7863785 U JP 7863785U JP 7863785 U JP7863785 U JP 7863785U JP S61195049 U JPS61195049 U JP S61195049U
- Authority
- JP
- Japan
- Prior art keywords
- middle plate
- water discharge
- pure water
- chamber
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000005406 washing Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7863785U JPS61195049U (fr) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7863785U JPS61195049U (fr) | 1985-05-28 | 1985-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61195049U true JPS61195049U (fr) | 1986-12-04 |
Family
ID=30622794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7863785U Pending JPS61195049U (fr) | 1985-05-28 | 1985-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61195049U (fr) |
-
1985
- 1985-05-28 JP JP7863785U patent/JPS61195049U/ja active Pending