JPS61195048U - - Google Patents

Info

Publication number
JPS61195048U
JPS61195048U JP1985077558U JP7755885U JPS61195048U JP S61195048 U JPS61195048 U JP S61195048U JP 1985077558 U JP1985077558 U JP 1985077558U JP 7755885 U JP7755885 U JP 7755885U JP S61195048 U JPS61195048 U JP S61195048U
Authority
JP
Japan
Prior art keywords
rotor
shielding case
wall
stator
shields
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985077558U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058674Y2 (ja�@�@
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985077558U priority Critical patent/JPH058674Y2/ja
Publication of JPS61195048U publication Critical patent/JPS61195048U/ja
Application granted granted Critical
Publication of JPH058674Y2 publication Critical patent/JPH058674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Control Of Electric Motors In General (AREA)
JP1985077558U 1985-05-24 1985-05-24 Expired - Lifetime JPH058674Y2 (ja�@�@)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985077558U JPH058674Y2 (ja�@�@) 1985-05-24 1985-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985077558U JPH058674Y2 (ja�@�@) 1985-05-24 1985-05-24

Publications (2)

Publication Number Publication Date
JPS61195048U true JPS61195048U (ja�@�@) 1986-12-04
JPH058674Y2 JPH058674Y2 (ja�@�@) 1993-03-04

Family

ID=30620732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985077558U Expired - Lifetime JPH058674Y2 (ja�@�@) 1985-05-24 1985-05-24

Country Status (1)

Country Link
JP (1) JPH058674Y2 (ja�@�@)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0341249U (ja�@�@) * 1989-09-01 1991-04-19

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741374A (en) * 1980-08-25 1982-03-08 Hitachi Ltd Sample mounting and dismounting device in plasma etching device or resembling device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741374A (en) * 1980-08-25 1982-03-08 Hitachi Ltd Sample mounting and dismounting device in plasma etching device or resembling device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0341249U (ja�@�@) * 1989-09-01 1991-04-19

Also Published As

Publication number Publication date
JPH058674Y2 (ja�@�@) 1993-03-04

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