JPS61195042U - - Google Patents

Info

Publication number
JPS61195042U
JPS61195042U JP7816985U JP7816985U JPS61195042U JP S61195042 U JPS61195042 U JP S61195042U JP 7816985 U JP7816985 U JP 7816985U JP 7816985 U JP7816985 U JP 7816985U JP S61195042 U JPS61195042 U JP S61195042U
Authority
JP
Japan
Prior art keywords
wafer
support plate
back side
heating jig
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7816985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7816985U priority Critical patent/JPS61195042U/ja
Publication of JPS61195042U publication Critical patent/JPS61195042U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP7816985U 1985-05-25 1985-05-25 Pending JPS61195042U (US06818201-20041116-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7816985U JPS61195042U (US06818201-20041116-C00086.png) 1985-05-25 1985-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7816985U JPS61195042U (US06818201-20041116-C00086.png) 1985-05-25 1985-05-25

Publications (1)

Publication Number Publication Date
JPS61195042U true JPS61195042U (US06818201-20041116-C00086.png) 1986-12-04

Family

ID=30621902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7816985U Pending JPS61195042U (US06818201-20041116-C00086.png) 1985-05-25 1985-05-25

Country Status (1)

Country Link
JP (1) JPS61195042U (US06818201-20041116-C00086.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730320A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Substrate holder for molecular beam epitaxy
JPS60112691A (ja) * 1983-11-18 1985-06-19 Anelva Corp 分子線エピタキシャル成長装置用の基板保持装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730320A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Substrate holder for molecular beam epitaxy
JPS60112691A (ja) * 1983-11-18 1985-06-19 Anelva Corp 分子線エピタキシャル成長装置用の基板保持装置

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