JPS61194326A - Pressure/differential pressure transmitter - Google Patents
Pressure/differential pressure transmitterInfo
- Publication number
- JPS61194326A JPS61194326A JP3443185A JP3443185A JPS61194326A JP S61194326 A JPS61194326 A JP S61194326A JP 3443185 A JP3443185 A JP 3443185A JP 3443185 A JP3443185 A JP 3443185A JP S61194326 A JPS61194326 A JP S61194326A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- metal
- pressure receiving
- differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は受圧ダイヤフラムを設けた圧力、差圧伝送器に
関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a pressure and differential pressure transmitter provided with a pressure receiving diaphragm.
受圧ダイヤフラムを設けた差圧伝送器としては図に示す
ような構成のものが知られている。As a differential pressure transmitter provided with a pressure receiving diaphragm, one having a configuration as shown in the figure is known.
図において、高圧側被測定流体が流入する流入口１ａを
有する７ランジ１と、低圧側被測定流体が流入する流入
口２ａを有する７ランジ２とはそれぞれ受圧ダイヤフラ
ム３および４を介してケーシング５．６および７には上
記受圧ダイヤフラム３および４に対向して受圧々゛イヤ
フラム座、〜、４Ａが設けられている。上記ケーシング
５．６．７は７ランジ１および２に対してシール部８に
よって液密にシールされており、また、ケーシング５．
６間には中間ダイヤフラム９が介在されている。In the figure, a 7 flange 1 having an inlet 1a into which the fluid to be measured on the high pressure side flows in, and a 7 lange 2 having an inlet 2a into which the fluid to be measured on the low pressure side flows, are connected to the casing 5 through pressure receiving diaphragms 3 and 4, respectively. .6 and 7 are provided with pressure receiving diaphragm seats .about.4A facing the pressure receiving diaphragms 3 and 4. The casing 5.6.7 is liquid-tightly sealed to the 7 flanges 1 and 2 by a seal 8;
An intermediate diaphragm 9 is interposed between 6 and 6.
そしてこの中間ダイヤフラム９と前記受圧ダイヤフラム
３によって形成される第１の空間１０（これはケーシン
グ５両側に形成される）には圧力伝達媒体１２Ａが充填
され、同様に中間ダイヤフラム９と前記受圧ダイヤフラ
ム４によって形成される第２の空間１１ （これはケー
シング６両側に形成される）には圧力伝達媒体１２Ｂが
充填されている。また、前記ケーシング７内には半導体
感圧素子１３が設けられていて、この感圧素子１３はそ
れぞれ連通孔１４．１５を介して上記空間１０゜１１に
連通され、圧力伝達媒体１２Ａおよび１２Ｂで伝達され
る差圧力を検知して１！気信号を変換し、リード線１６
を介して外部に出力するようになっている。A first space 10 (this is formed on both sides of the casing 5) formed by the intermediate diaphragm 9 and the pressure receiving diaphragm 3 is filled with a pressure transmission medium 12A. The second space 11 (which is formed on both sides of the casing 6) is filled with a pressure transmission medium 12B. Further, a semiconductor pressure-sensitive element 13 is provided in the casing 7, and the pressure-sensitive elements 13 are communicated with the space 10.degree. 1 by detecting the transmitted differential pressure! Converts the air signal and connects the lead wire 16
It is designed to be output externally via .
上記差圧伝送器において、中間ダイヤフラム９は過大差
圧力を保護する目的で設けられたものであり、その剛性
が受圧ダイヤフラム３．４の剛性に比べて充分大きくな
るように配ｚして設計されている。例えば高圧側に、低
圧側に比べて大きい圧力が加わると、中間ダイヤフラム
９は図の右方向に移動し、その撓みによって生じた容積
分だけ受圧ダイヤフラム３が右方向に移動する。In the above differential pressure transmitter, the intermediate diaphragm 9 is provided for the purpose of protecting against excessive differential pressure, and is arranged and designed so that its rigidity is sufficiently greater than that of the pressure receiving diaphragm 3.4. ing. For example, when a pressure greater than that on the low pressure side is applied to the high pressure side, the intermediate diaphragm 9 moves to the right in the figure, and the pressure receiving diaphragm 3 moves to the right by the volume created by the deflection.
さらに大きな圧力が高圧側に加わると、中間ダイヤフラ
ム９は更に右方向に移動するが、受圧ダイヤフラム３は
受圧ダイヤフラム座３人にＭ座してそれ以上の移動が起
こらないので、着座後はさらに大きい圧力が受圧ダイヤ
フラム３に加わっても圧力伝達媒体１２Ａには着座時の
圧力がそのまま保持されｉ！１３［Ｅ素子１３に対して
過大差圧が加わり、破損させるおそれはなくなる。受圧
ダイヤフラム４側についても同様のことがいえる。When an even larger pressure is applied to the high pressure side, the intermediate diaphragm 9 moves further to the right, but the pressure receiving diaphragm 3 is seated M on the three pressure receiving diaphragm seats and no further movement occurs, so after seating the intermediate diaphragm 9 moves even more. Even if pressure is applied to the pressure receiving diaphragm 3, the pressure at the time of seating is maintained in the pressure transmission medium 12A, i! 13 [There is no risk of excessive differential pressure being applied to the E element 13 and damaging it. The same can be said about the pressure receiving diaphragm 4 side.
一方、受圧ダイヤフラム３．４は被測定流体と圧力伝達
媒体１２人、１２Ｂを分離するためのもので、圧力をで
きる限り損失なく伝えるように、剛性の低いことが望ま
しい。On the other hand, the pressure receiving diaphragm 3.4 is for separating the fluid to be measured from the pressure transmitting medium 12, 12B, and is preferably low in rigidity so as to transmit pressure with as little loss as possible.
−Ｇ“的には中間ダイヤフラム９と受圧ダイヤフラム３
．４の剛性比を５０：１以上に設定すれば、圧力損失率
（受圧ダイヤフラム３．４の外側の差圧が内側に伝達さ
れる際の損失の割合）は３，９％以下となり、実用上差
し支えない程度に向上する。−G” In terms of intermediate diaphragm 9 and pressure receiving diaphragm 3
．． If the rigidity ratio of 4 is set to 50:1 or more, the pressure loss ratio (the ratio of loss when the differential pressure on the outside of the pressure receiving diaphragm 3.4 is transmitted to the inside) will be 3.9% or less, which is practically Improve to an acceptable level.
上記のように受圧ダイヤフラム３．４の剛性を低く抑え
るためには板厚を可能な限り薄くシ、かつ有効径をでき
るだけ大きくすることが考えられる。As mentioned above, in order to keep the rigidity of the pressure receiving diaphragm 3.4 low, it is conceivable to make the plate thickness as thin as possible and to make the effective diameter as large as possible.
しかし、従来ダイヤフラムとして用いられている５ＵＳ
３１６Ｌ等の板厚を薄くして剛性を低くしようとすると
、材料の加工性、分度の点より５０μｍ程度が限度とい
える。また、有効径を大きくしようとするとケーシング
自体も大きくせざるを得ず、軽量、小型化の要求に反し
、実用性に乏しい。However, 5US, which is conventionally used as a diaphragm,
When trying to reduce the rigidity by thinning a plate such as 316L, the limit is about 50 μm due to the workability and accuracy of the material. Furthermore, if an attempt is made to increase the effective diameter, the casing itself must also be increased in size, which goes against the demands for lightweight and compact design and is impractical.
更に圧力損失率が低く、シかも使用環境の影響を受けず
、被測定流体に対して優れた耐食性を有する等の特性を
満たすことは、従来の５ＵＳ３１６１等の材料では困難
である。Furthermore, it is difficult for conventional materials such as 5US3161 to satisfy characteristics such as a low pressure loss rate, being unaffected by the operating environment, and having excellent corrosion resistance against the fluid to be measured.
すると機械的特性に問題が生じ、小形軽量化を疎外する
欠点もあった。This resulted in problems with mechanical properties, which also had the drawback of making it impossible to make it smaller and lighter.
本発明は上記事情に鑑みてなされたものであり、軽量、
小型で、圧力損失率が低く、更には耐環境性、耐食性に
優れた圧力、差圧伝送器を提供しようとするものである
。The present invention has been made in view of the above circumstances, and is lightweight,
The present invention aims to provide a pressure/differential pressure transmitter that is small in size, has a low pressure loss rate, and has excellent environmental resistance and corrosion resistance.
本発明者等の検討によれば、受圧ダイヤフライ用材料と
して金属−金ＰＡ系非晶質合金を用いることにより上記
問題点が解消されることをみいだした。According to studies by the present inventors, it has been found that the above-mentioned problems can be solved by using a metal-gold PA-based amorphous alloy as the material for the pressure-receiving diamond fly.
金属−余尺系非晶質合金は脆化抵抗が強く、弾性率が低
いため、ダイヤプラムとして好適である。A metal-extra-scale amorphous alloy has strong embrittlement resistance and low elastic modulus, and is therefore suitable for use as a diaphragm.
本発明に用いられるアモルファス合金は、一般式％式％
選ばれる少なくとも１種である。Ｍ′は、Ｖ Ｉ ＮＣ
ｒ、Ｍｎ、Ｏｎ、Ｍｏ、Ｒｈ、Ｐｄ、ＲｎｓＡｇ、Ｗ、
Ｒｅ、Ｉ ｒ、Ｐ ｔ 、ＡｕよりＪｔｆｈる少なくと
も１種であり、Ｍは主に耐熱性および機械的特性を向上
させるが、耐食性を考虜した場合にはｃｒ、Ｃｕ、Ｒｈ
ＸＰｄ、ＡｇＸＲｎ、Ａｇ。The amorphous alloy used in the present invention is at least one selected from the general formula %. M' is VI NC
r, Mn, On, Mo, Rh, Pd, RnsAg, W,
It is at least one of Re, Ir, Pt, and Jtfh than Au, and M mainly improves heat resistance and mechanical properties, but when considering corrosion resistance, cr, Cu, Rh
XPd, AgXRn, Ag.
工ｒ、Ｐｔ、Ａｕが好ましく、脆化抵抗を増すには■、
ＭＯ１ＷＳ几ｅが好ましい。これらの効果はａｇｏ、０
０１では得られに＜＜、またａ ＞ ０．２０では非晶
ｚｖ状態が得られにくいので、０．００１＜ａ＜０．２
０としたＴは非晶質化に必要な金属元素であり、Ｔｉ、
Ｚｒ５ＨｆＳＮｂＳＴａより選ばれる少なくとも１種以
」―である。ｂは６％以下および２５％以上では非晶質
状態が得られにくいので、Ｉｌｌ ａが好ましい。Ｙは
、非晶質化を助長するための元素であり、具体的にはＳ
ｉ、Ｂ、Ｐ％Ｃ，Ｇｅ好ましい。また、上記の一般式以
外でもＴｉ５０Ｃｕ５０ＳＣｕ８０Ｚｒ２０．Ｎｂ５Ｏ
Ｎ１５０など、金ｍ−金属系アモルファス合金あるいは
これに少量の非金属非晶１１化ト叶←壬→元素を加えた
ものでも同等の効果が得られる。Preferred are Pt, Au, and to increase embrittlement resistance,
MO1WS is preferred. These effects are ago, 0
01, it is difficult to obtain an amorphous zv state, and when a > 0.20, it is difficult to obtain an amorphous zv state, so 0.001<a<0.2
T, which is set to 0, is a metal element necessary for amorphization, and Ti,
At least one type selected from Zr5HfSNbSTa. If b is less than 6% or more than 25%, it is difficult to obtain an amorphous state, so Illa is preferred. Y is an element for promoting amorphization, specifically S
i, B, P% C, Ge is preferred. In addition, other than the above general formula, Ti50Cu50SCu80Zr20. Nb5O
A similar effect can be obtained using a gold metal-based amorphous alloy such as N150 or a small amount of non-metallic amorphous 11-oxide element added thereto.
また、本発明者らは下記式に示す受圧ダイヤフラムの圧
力−変位特性、
（ここでＰは圧力、Ｗはダイヤフラムの中心変位ｌ、Ｒ
はダイヤフラムの有効半径、ｔは板厚、Ｅは縦弾性係数
、ｑはダイヤフラムの波形状による形状係数である）
をもとにして、ｃ４ｚＲ−ｚ を一定条件下での圧力、
差圧伝送器の圧力伝達性に及ぼす縦弾性係数Ｅの影輯に
ついて鋭意研究を行なった。その結果、受圧ダイヤプラ
ムを１ｇ成する弾性金ｍＨ板の縦弾性係数を１５０００
ｋｇ ／ｍｒｒｔ以下にすると、ＳＵ！９３１６Ｌに
比べ、同一有効半径、同一板厚でも圧力損失率が実用上
差し支えないところまで低下して圧力伝達性が向上し、
受圧ダイヤプラムの小径化を達成できることを見出した
。In addition, the present inventors have calculated the pressure-displacement characteristic of the pressure-receiving diaphragm as shown in the following formula, (where P is the pressure, W is the center displacement l of the diaphragm, and R
is the effective radius of the diaphragm, t is the plate thickness, E is the modulus of longitudinal elasticity, and q is the shape factor due to the wave shape of the diaphragm), then c4zR-z is the pressure under certain conditions,
We have conducted extensive research on the influence of the longitudinal elastic modulus E on the pressure transmissibility of differential pressure transmitters. As a result, the longitudinal elastic modulus of the elastic gold mH plate that makes up 1 g of the pressure diaphragm was 15,000.
If it is less than kg/mrrt, SU! Compared to 9316L, even with the same effective radius and the same plate thickness, the pressure loss rate has been reduced to a point where there is no practical problem, and the pressure transmittance has been improved.
We have discovered that it is possible to reduce the diameter of the pressure receiving diaphragm.
すなわち、本発明の圧力、差圧伝送２まにおいて、受圧
ダイヤフラムを１成する弾性金肥薄板の縦弾性係数Ｂが
２０００〜１５０００ ｋｇｚ加ぎであるこ・とが望ま
しい。１５０００ｋｇ／ｒｒ′ｆ′ｎ２を超えると８Ｕ
Ｓ ３１６Ｌ （Ｅ＝２００００ｋｇ／ｒｒｒｎ２）よ
りなる受圧ダイヤプラムによる圧力伝達性と大差がなく
、効果が顕著に認められないためであり、一方、２００
０ｋｇ／ｎ−未満であるとｈｑ性が低すぎて強度上の間
ヴζ１よりｆｌ材として不適当となるためである０
（発明の実施ｅＡ＋ ）
以下本発明を実施例に基づいて説明する。That is, for the pressure and differential pressure transmission 2 of the present invention, it is desirable that the longitudinal elastic modulus B of the elastic thin plate forming one part of the pressure receiving diaphragm is 2000 to 15000 kgz. 8U if over 15000kg/rr'f'n2
This is because there is no significant difference in pressure transmittance from the pressure receiving diaphragm made of S 316L (E = 20000 kg/rrrn2), and the effect is not noticeable.
If it is less than 0 kg/n-, the hq property will be too low and the material will be unsuitable as a fl material due to the strength of the material.
実玲倒１
第１表に示す組成を有する非Ｍ・賀合金薄帯（幅試料を
打抜き第１図、３．４の受圧ダイヤフラムとし、差圧伝
送器を作成した。A differential pressure transmitter was made by punching out a non-M/Ga alloy thin strip (width sample) having the composition shown in Table 1 and making it into a pressure-receiving diaphragm as shown in Figure 1 and 3.4.
これらの差圧伝送器につき、その圧力伝達性を調べた。The pressure transmittance of these differential pressure transmitters was investigated.
その結果を表１にまとめであるが、本発明の受圧ダイヤ
フラムを用いた差圧伝送器の圧力損失率は約２％であり
、小さい。一方比較として、同様のことを受圧ダイヤフ
ラムとして従来材であるＳＵＳ ３１６Ｌ、またＦｅ８
０Ｂ２０非晶質合金を用いた差圧伝送器についても行な
ったが圧力損失率は４〜５％と本発明のダイヤフラムに
比べ大きかった。 ｙ゛人千、白
〔発明の効果〕
以上詳述した如く本発明によれば、軽量、小型でも圧力
伝達性が良好で、更には耐環境性、耐食性に優れた圧力
、差力伝送器を提供できるものである。The results are summarized in Table 1, and the pressure loss rate of the differential pressure transmitter using the pressure receiving diaphragm of the present invention is about 2%, which is small. On the other hand, for comparison, the same thing was done with the conventional material SUS 316L and Fe8 as the pressure receiving diaphragm.
A differential pressure transmitter using 0B20 amorphous alloy was also tested, but the pressure loss rate was 4 to 5%, which was larger than the diaphragm of the present invention. [Effects of the Invention] As detailed above, the present invention provides a pressure and differential force transmitter that is lightweight and compact, yet has good pressure transmission properties, and has excellent environmental resistance and corrosion resistance. This is something that can be provided.
図面は差圧伝送器本体の断面図である。
１．２１１０７ランジ、ｌａ、２ａ・・・流入口、３゜
４・・・受圧ダイヤフラム、３人、４Ａ・・・受圧ダイ
ヤフラム座、５．６．７・−・ケーシング、８・・・シ
ール部１９°°°中間ダイヤフラム、１０・・・第１の
空間、１１−°°第２の空間、１２Ａ、１２Ｂ・・・圧
力伝達媒体、１３・・・半導体感圧素子、１４．１５・
・・連通ル’１６・・・リード線。The drawing is a sectional view of the main body of the differential pressure transmitter. 1.21107 lange, la, 2a...inlet, 3゜4...pressure receiving diaphragm, 3 people, 4A...pressure receiving diaphragm seat, 5.6.7...casing, 8...seal part 19°°° intermediate diaphragm, 10... first space, 11-°° second space, 12A, 12B... pressure transmission medium, 13... semiconductor pressure sensitive element, 14.15.
・Communication Le '16...Lead wire.
Claims (1)
被測定流体の圧力を検出して電気信号を変換し、外部に
出力する感圧素子を傭えた圧力、差圧伝送器において、
前記弾性金属薄板として金属、金属系非晶質合金を用い
たことを特徴とする圧力、差圧伝送器。 （２）前記弾性金属薄板の縦弾性係数Ｅが２０００〜１
５０００ｋｇ／ｍｍ＾２であることを特徴とする特許請
求の範囲第１項記載の圧力、差圧伝送器。 （３）前記金属−金属系非晶質合金は （Ｍ１−ａＭ′ａ）１００−ｂ−ｃＴｂＹｃＭ：Ｆｅ、
Ｃｏ、Ｎｉより選ばれる少なくとも１種 Ｍ′：Ｖ、Ｃｒ、Ｍｎ、Ｃｕ、Ｍｏ、Ｒｈ、Ｐｄ、Ａｇ
、Ｗ、Ｒｅ、Ｉｒ、Ｐｔ、Ａｕより選ばれる少なくとも
１種以上 Ｔ：Ｔｉ、Ｚｒ、Ｈｆ、Ｎｂ、Ｔａより選ばれる少なく
とも１種以上 Ｙ：Ｓｉ、Ｂ、Ｐ、Ｃ、Ｇｅより選ばれる少なくとも１
種以上 ０．００１≦ａ≦０．２０ ６≦ｂ≦２５ ０≦ｃ≦１０ で与えられることを特徴とする特許請求の範囲第１項記
載の圧力、差圧伝送器。[Claims] (1) A pressure-receiving diaphragm made of an elastic thin metal plate is provided,
A pressure or differential pressure transmitter that uses a pressure-sensitive element that detects the pressure of the fluid to be measured, converts it into an electrical signal, and outputs it to the outside.
A pressure/differential pressure transmitter characterized in that a metal or a metal-based amorphous alloy is used as the elastic metal thin plate. (2) The longitudinal elastic modulus E of the elastic metal thin plate is 2000 to 1
The pressure and differential pressure transmitter according to claim 1, characterized in that the pressure is 5000 kg/mm^2. (3) The metal-metal amorphous alloy is (M1-aM'a)100-b-cTbYcM:Fe,
At least one M' selected from Co and Ni: V, Cr, Mn, Cu, Mo, Rh, Pd, Ag
, W, Re, Ir, Pt, and Au T: At least one species selected from Ti, Zr, Hf, Nb, and Ta Y: At least one species selected from Si, B, P, C, and Ge 1
The pressure and differential pressure transmitter according to claim 1, characterized in that the pressure and differential pressure transmitters are given by the following: 0.001≦a≦0.20, 6≦b≦25, 0≦c≦10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3443185A JPS61194326A (en) | 1985-02-25 | 1985-02-25 | Pressure/differential pressure transmitter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3443185A JPS61194326A (en) | 1985-02-25 | 1985-02-25 | Pressure/differential pressure transmitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61194326A true JPS61194326A (en) | 1986-08-28 |
Family
ID=12414027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3443185A Pending JPS61194326A (en) | 1985-02-25 | 1985-02-25 | Pressure/differential pressure transmitter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194326A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0521246A2 (en) * | 1991-07-04 | 1993-01-07 | Fuji Electric Co., Ltd. | Pressure measuring apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950331A (en) * | 1982-09-16 | 1984-03-23 | Toshiba Corp | Diaphragm structure of transmitting device |
-
1985
- 1985-02-25 JP JP3443185A patent/JPS61194326A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950331A (en) * | 1982-09-16 | 1984-03-23 | Toshiba Corp | Diaphragm structure of transmitting device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0521246A2 (en) * | 1991-07-04 | 1993-01-07 | Fuji Electric Co., Ltd. | Pressure measuring apparatus |
| US5400655A (en) * | 1991-07-04 | 1995-03-28 | Fuji Electric Co., Ltd. | Pressure measuring apparatus |
| US5551299A (en) * | 1991-07-04 | 1996-09-03 | Fuji Electric Co., Ltd. | Apparatus for measuring pressure in a fluid using a seal diaphragm and pressure transmitting medium |
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