CN115595472B

CN115595472B - Assembly structure of strain beam and elastic body and pressure sensor

Info

Publication number: CN115595472B
Application number: CN202211503330.3A
Authority: CN
Inventors: 雷卫武; 范敏; 徐建; 刘素夫; 彭山
Original assignee: Songnuomeng Technology Co ltd
Current assignee: Songnuomeng Technology Co ltd
Priority date: 2022-11-29
Filing date: 2022-11-29
Publication date: 2023-03-10
Anticipated expiration: 2042-11-29
Also published as: CN115595472A

Abstract

The application provides a high-temperature constant-elasticity alloy material, a process for preparing a strain beam by using the high-temperature constant-elasticity alloy material, an assembly structure of the strain beam and an elastomer and a pressure sensor, and relates to the technical field of sensors. The high-temperature constant-elasticity alloy material comprises the following raw materials: ti, al, ni, V, nb, co, cr, mo + W, cu, ag, C, si, S, P, mn, ce + La, ru + Ir, and the balance Fe. The material has the advantages of good mechanical property and high temperature resistance, and the assembly structure of the strain beam and the elastomer prepared from the material cannot be disturbed by surface depression, so that the pressure sensor formed by the assembly structure has the advantages of large working temperature range, high sensitivity and good stability.

Description

Assembly structure of strain beam and elastic body and pressure sensor

Technical Field

The application relates to the technical field of sensors, in particular to an assembly structure of a strain beam and an elastic body and a pressure sensor.

Background

The high-temperature pressure sensor is widely applied to the fields of nuclear power, petrifaction, metallurgy, aviation, rubber and the like. The sputtering film pressure sensor is a pressure sensor with excellent performance, has the advantages of high precision, good stability, high temperature of measured medium and the like, and is applied to various fields of aviation, aerospace, military industry and the like. However, when the temperature of the medium exceeds 300 ℃, the common sputtering film pressure sensor can not be sufficient. The reason is that the common sputtering film pressure sensor elastic body is made of conventional elastic steel, the elastic modulus of the elastic body changes along with the temperature change, and the measurement accuracy of the sensor is seriously influenced by the change.

In addition, the metal-based sputtered film pressure sensor is extremely difficult to realize small-range measurement because the elastomer diaphragm cannot be processed into a very small thickness, such as less than 0.1 mm, when the elastomer is processed; even if the elastic membrane can be processed to be less than 0.1 mm in thickness, in the subsequent processing process of the elastic body, when the elastic membrane is ground and polished, because the elastic membrane is too thin and is easy to dent, the surface of the elastic membrane can not be coated with a film for photoetching to manufacture a strain circuit. Therefore, the sputtering film pressure sensor can not manufacture a high-precision small-range (such as less than 0.5 MPa) pressure sensor, and the popularization and application of the product in many fields such as rail transit and new energy vehicles are limited.

Disclosure of Invention

The application aims to provide a high-temperature constant-elasticity alloy material which has the advantages of good mechanical property and high temperature resistance.

Another object of the present application is to provide a process for preparing a strain beam from the high-temperature constant-elasticity alloy material.

Still another object of the present application is to provide an assembly structure of a strain beam and an elastic body, which does not need to grind and polish the elastic membrane of the elastic body in subsequent processing, and therefore, does not suffer from surface indentation.

Still another object of the present application is to provide a pressure sensor, which has the advantages of large working temperature range, high sensitivity and good stability.

The technical problem to be solved by the application is achieved by adopting the following technical scheme.

On one hand, the embodiment of the application provides a high-temperature constant-elasticity alloy material which comprises the following raw materials in percentage by mass: 6.9 to 12.9 percent of Ti, 1 to 5 percent of Al, 27 to 41 percent of Ni, 0.7 to 5.6 percent of V, 0.45 to 5.6 percent of Nb, 0.6 to 3 percent of Co, 0.6 to 3.9 percent of Cr, 2.9 to 6.5 percent of Mo + W, 0.1 to 0.6 percent of Cu, 0.04 to 0.22 percent of Ag, 0 to 0.03 percent of C, 0.1 to 0.65 percent of Si, 0 to 0.01 percent of S, 0 to 0.01 percent of P, 0 to 0.05 percent of Mn, 0.02 to 0.38 percent of Ce + La, 1.2 to 3.3 percent of Ru + Ir and the balance of Fe.

On the other hand, the embodiment of the application provides a process for preparing a strain beam by using the high-temperature constant-elasticity alloy material, which comprises the following steps:

preparing a high-temperature constant-elasticity alloy material, machining grooves which are symmetrical left and right on the back of the material by a mechanical method, and reserving the thickness of a strain diaphragm when machining the grooves; grinding and polishing the upper surface of the material with the processed groove to ensure that the surface roughness of the material meets the requirement; depositing an insulating layer, a sensitive layer and a pad layer film on the surface of the ground and polished material by using a physical or chemical method, and manufacturing a Wheatstone bridge pattern by using a photoetching technology; mechanical methods are used to separate the material into individual strain beams.

In another aspect, an embodiment of the present application provides an assembly structure of a strain beam and an elastic body, including the elastic body and the strain beam made of the high-temperature constant-elasticity alloy material, where the strain beam is attached to an upper end of the elastic body.

In another aspect, an embodiment of the present application provides a pressure sensor, including the above-mentioned assembly structure, further including a housing, a pressure nozzle, a conditioning circuit board, a lead wire and a pressure guiding hole, where the housing is connected to the pressure nozzle, the conditioning circuit board is disposed in the housing, the lead wire is connected to the conditioning circuit board, the lead wire passes through the housing and the conditioning circuit board and is connected to a Hui Shitong electrical bridge on the strain beam, a lower end of the elastic body is disposed on the pressure nozzle and is hermetically welded, and the pressure guiding hole in the pressure nozzle is opposite to the slotted hole of the elastic body.

Compared with the prior art, the embodiment of the application has at least the following advantages or beneficial effects:

1. ruthenium and iridium (Ru and Ir) are added into the material components, and are strong antioxidants, so that the alloy has good oxidation resistance at the ultrahigh temperature of 1000 ℃ (which is completely different from the conventional high-temperature alloy). The titanium (Ti) strengthening element promotes the phase change precipitation process and improves the mechanical property. The addition of cerium and lanthanum (Ce, la) elements can greatly improve the elastic hysteresis performance of the alloy, and is beneficial to improving the measurement precision of the sensor. Tungsten and molybdenum (W, mo) are added to improve the high-temperature strength. The alloy is smelted into an alloy rod, has almost unchanged elastic modulus at the ultrahigh temperature of 1000 ℃, and has excellent mechanical properties.

2. The strain beam and the elastic body are prepared from the high-temperature constant-elasticity alloy material and are welded, and the elastic membrane of the elastic body is not required to be ground and polished in subsequent processing, so that the trouble of surface depression cannot be caused.

3. The pressure sensor which consists of the strain beam prepared from the high-temperature constant-elasticity alloy material, the elastomer pressure sensor and other parts has the advantages of large working temperature range, high sensitivity and good stability.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.

FIG. 1 is a diagram of a Hui Shitong bridge strain resistor layout in an embodiment of the present application;

FIG. 2 is a schematic structural diagram of an elastomer and a strain beam according to an embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of the pressure sensor of the present application.

Icon: 1-a strain beam; 2-an elastomer; 3-left side column; 4-right side column; 5-a central column; 6-strain diaphragm; 7-a groove; 8-an elastic membrane; 9-lateral side; 10-circular islands; 11-a central groove; 19-a housing; 12-a conditioning circuit board; 13-a lead; 14-stress isolation trenches; 15-a pressure-leading nozzle; 16-a hexagonal base; 17-external threads; 18-a pressure-inducing hole; 20-tensile strain resistance; 21-compressive strain resistance.

Detailed description of the preferred embodiments

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions of the embodiments of the present application will be clearly and completely described below. The examples, in which specific conditions are not specified, were conducted under conventional conditions or conditions recommended by the manufacturer. The reagents or instruments used are not indicated by the manufacturer, and are all conventional products available commercially.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to specific examples.

A high-temperature constant-elasticity alloy material comprises the following raw materials in percentage by mass: 6.9 to 12.9 percent of Ti, 1 to 5 percent of Al, 27 to 41 percent of Ni, 0.7 to 5.6 percent of V, 0.45 to 5.6 percent of Nb, 0.6 to 3 percent of Co, 0.6 to 3.9 percent of Cr, 2.9 to 6.5 percent of Mo + W, 0.1 to 0.6 percent of Cu, 0.04 to 0.22 percent of Ag, 0 to 0.03 percent of C, 0.1 to 0.65 percent of Si, 0 to 0.01 percent of S, 0 to 0.01 percent of P, 0 to 0.05 percent of Mn, 0.02 to 0.38 percent of Ce + La, 1.2 to 3.3 percent of Ru + Ir and the balance of Fe.

Ruthenium and iridium (Ru and Ir) which are strong antioxidants are added into the material components, so that the alloy has good oxidation resistance at the ultra-high temperature of 1000 ℃ (which is completely different from the conventional high-temperature alloy). The titanium (Ti) strengthening element promotes the phase change precipitation process and improves the mechanical property. The addition of cerium and lanthanum (Ce, la) elements can greatly improve the elastic hysteresis performance of the alloy, and is beneficial to improving the measurement precision of the sensor. Tungsten and molybdenum (W, mo) are added to improve the high-temperature strength. The alloy is smelted into an alloy rod, has almost unchanged elastic modulus at the ultrahigh temperature of 1000 ℃, and has excellent mechanical properties.

A process for preparing a strain beam by adopting the high-temperature constant-elasticity alloy material comprises the following steps:

preparing a high-temperature constant-elasticity alloy material, machining a left-right symmetrical groove 7 on the back of the material by a mechanical method, and reserving the thickness of a strain diaphragm 6 when machining the groove 7;

grinding and polishing the upper surface of the material with the processed groove 7 to ensure that the surface roughness of the material meets the requirement;

depositing an insulating layer, a sensitive layer and a pad layer film on the surface of the ground and polished material by using a physical or chemical method, and manufacturing a Wheatstone bridge pattern by using a photoetching technology;

mechanical methods are used to separate the material into individual strain beams 1.

In some embodiments of the present application, the above-mentioned roughness Ra ≦ 10nm, which satisfies the relevant requirements.

In some embodiments of the present application, the above-mentioned strained membrane 6 has a thickness of 0.09-0.67mm.

The assembly structure of the strain beam and the elastic body comprises the elastic body 2 and the strain beam 1, wherein the elastic body 2 and the strain beam 1 are made of the high-temperature constant-elasticity alloy material, and the strain beam 1 is attached to the upper end of the elastic body 2.

In some embodiments of the present application, above-mentioned straining beam 1 includes strain membrane 6, left side post 3, right side post 4, center post 5 and recess 7, elastomer 2 includes limit lateral part 9, central slot 11, elastic membrane 8 and circular island 10, between left side post 3 and the center post 5, all form strain membrane 6 that is located the top and recess 7 that is located the below between center post 5 and the right side post 4, form elastic membrane 8 between the upper end of avris portion 9, elastic membrane 8 is located the top of central slot 11, elastic membrane 8's lower extreme middle part is equipped with circular island 10, left side post 3, the lower extreme of right side post 4 all laminates with the upper end of avris portion 9, the lower extreme of center post 5 laminates with elastic membrane 8's upper end.

In some embodiments of the present application, the central column 5 corresponds up and down to the position of the circular island 10.

In some embodiments of the present application, the thickness of the elastic membrane 8 is 0.09-0.67mm. In the present application, the thickness of the elastic diaphragm 8 and the strain diaphragm 6 can be changed along with the mechanical structure of the sensor and the measuring range of the sensor, which is mainly determined by the measuring range of the pressure sensor, if the measuring range is large, the thickness of the elastic diaphragm 8 and the strain diaphragm 6 is thickened, thus realizing the pressure measurement of the whole measuring range. Taking a sensor with an inner diameter of 3.5mm as an example, the thicknesses of the elastic diaphragm 8 and the strain diaphragm 6 of the present application are approximately as shown in table 1.

TABLE 1

Measuring range (Mpa)	Thickness (mm)
		1	0.09
2	0.12
		3	0.15
4	017
		5	0.19
6	0.21
		7	0.23
8	0.24
		9	0.26
10	0.27
		15	0.33
20	0.39
		25	0.43
30	0.47
		40	0.55
50	0.61
		60	0.67

A pressure sensor comprises the assembly structure, and further comprises a shell 19, a pressure guide nozzle 15, a conditioning circuit board 12, a lead 13 and a pressure guide hole 18, wherein the shell 19 is connected with the pressure guide nozzle 15, the conditioning circuit board 12 is arranged in the shell 19, the lead 13 is connected with the conditioning circuit board 12, the lead 13 penetrates through the shell 19 and the conditioning circuit board 12 and is connected with a pad on a Whiteon bridge on a strain beam 1, the lower end of an elastic body 2 is arranged on the pressure guide nozzle 15 and realizes laser sealing welding, and the pressure guide hole 18 in the pressure guide nozzle 15 is opposite to a slotted hole of the elastic body 2.

In some embodiments of the present application, the pressure-introducing nozzle 15 is provided with a front external thread 17 and a rear hexagonal seat 16.

The features and properties of the present application are described in further detail below with reference to examples.

Examples

A high-temperature constant-elasticity alloy material comprises the following raw materials in percentage by mass: 11.3 percent of Ti, 1.2 percent of Al, 27.5 percent of Ni, 3.2 percent of V, 0.8 percent of Nb, 0.8 percent of Co, 1.2 percent of Cr1, 3.5 percent of Mo + W, 0.2 percent of Cu, 0.09 percent of Ag, 0.02 percent of C, 0.35 percent of Si, 0.01 percent of S, 0.01 percent of P, 0.05 percent of Mn, 0.1 percent of Ce + La, 1.5 percent of Ru + Ir and the balance of Fe.

Examples

A high-temperature constant-elasticity alloy material comprises the following raw materials in percentage by mass: 8.5 percent of Ti, 2.4 percent of Al, 37.5 percent of Ni, 2.6 percent of V, 0.5 percent of Nb, 2.3 percent of Co2, 3.5 percent of Cr, 2.9 percent of Mo + W, 0.1 percent of Cu, 0.04 percent of Ag, 0.01 percent of C, 0.1 percent of Si, 0.01 percent of S, 0.01 percent of P, 0.01 percent of Mn, 0.05 percent of Ce + La, 3.1 percent of Ru + Ir and the balance of Fe.

Examples

A high-temperature constant-elasticity alloy material comprises the following raw materials in percentage by mass: ti 7%, al 4.1%, ni 27%, V4.8%, nb 5.1%, co 2.2%, cr 3.4%, mo + W5.5%, cu 0.51%, ag 0.19%, C0.02%, si 0.55%, S0.01%, P0.01%, mn 0.03%, ce + La 0.2%, ru + Ir 3.2%, and the balance Fe.

Examples

A process for preparing a strain beam 1 by adopting a high-temperature constant-elasticity alloy material comprises the following steps:

preparing a high-temperature constant-elasticity alloy material with a certain thickness (the high-temperature constant-elasticity alloy material prepared by adopting the formula in example 1 in the embodiment), processing the high-temperature constant-elasticity alloy material into a size of 4 inches (in other embodiments of the application, the high-temperature constant-elasticity alloy material can also be 8 inches or 12 inches), processing a left-right symmetrical groove 7 on the back surface of the material by a mechanical method, calculating and reserving the thickness of the strain diaphragm 6 according to the measurement range of the sensor when the groove 7 is processed, wherein the measurement range of the embodiment is 1Mpa, so that the thickness of the strain diaphragm 6 is 0.09mm; in other embodiments of the present application, as the span of the sensor increases, the thickness of the strained membrane 6 increases accordingly.

Grinding and polishing the upper surface of the material with the processed groove 7 to ensure that the surface roughness of the material meets the requirement that Ra is less than or equal to 10 nm;

depositing an insulating layer, a sensitive layer and a pad layer film on the surface of the ground and polished material by using a physical or chemical method, and manufacturing a Wheatstone bridge pattern by using a photoetching technology, wherein strain resistors are arranged as shown in figure 1, a unit is shown in figure 1, the center of the figure 1 is a tensile strain resistor 20, two edges of the figure 1 are compressive strain resistors 21, when the material is used, the two edge resistors generate compressive strain when stressed, and the two center resistors generate tensile strain when stressed; the pressure measurement is realized by a Wheatstone bridge consisting of two compressive strain resistors 21 and two tensile strain resistors 20.

In the embodiment, the elastomer 2 is prepared from a high-temperature constant-elasticity alloy material, and a circular island 10 is left in the center of the inside of the elastomer 2. To manufacture small range products, the elastic membrane 8 is machined to a thickness of 0.09mm.

The strain beam 1 is welded or glued on the elastic body 2 to form an assembly structure of the strain beam 1 and the elastic body 2, and as shown in fig. 2, the elastic membrane 8 of the elastic body 2 does not need to be ground and polished in subsequent processing, so that the assembly structure is not affected by surface depression. In this assembly structure, between the left side post 3 of straining beam 1 and center post 5, all form the strain diaphragm 6 that is located the top and the recess 7 that is located the below between center post 5 and the right post 4, form elastic diaphragm 8 between the upper end of 2 avris portions of elastomer 9, elastic diaphragm 8 is located the top of central groove 11, elastic diaphragm 8's lower extreme middle part is equipped with circular island 10, straining beam 1's the left side post 3, the lower extreme of right post 4 all laminates with the upper end of 2 avris portions of elastomer 9, the lower extreme of center post 5 laminates with elastic diaphragm 8's upper end, specifically center post 5 corresponds from top to bottom with circular island 10's position.

The working process of the assembly structure of the strain beam 1 and the elastic body 2 is as follows: the elastic body 2 is stressed and then transmits force to the strain beam 1 through the central column 5, the electric bridge on the strain beam 1 deforms, the electric bridge outputs an electric signal in direct proportion to corresponding pressure, and the pressure value of the sensor can be known through detecting the electric signal.

Examples

A high-temperature constant-elasticity alloy nano-film pressure sensor comprises the assembly structure of embodiment 4, and further comprises a shell 19, a pressure guiding nozzle 15, a conditioning circuit board 12, a lead 13 and a pressure guiding hole 18, wherein the shell 19 is connected with the pressure guiding nozzle 15, the conditioning circuit board 12 is arranged in the shell 19, the lead 13 is connected with the conditioning circuit board 12, the lead 13 penetrates through the shell 19 and the conditioning circuit board 12 and is connected with a pad on a Whiteon bridge on a strain beam 1, the lower end of an elastic body 2 is arranged on the pressure guiding nozzle 15 and realizes laser sealing welding, the pressure guiding hole 18 in the pressure guiding nozzle 15 is opposite to a slotted hole of the elastic body 2, and the structure is shown in fig. 3.

In this embodiment, the pressure-inducing nozzle 15 and the inner side of the hexagonal seat 16 of the sensor are provided with the stress isolation groove 14, which has the advantage that when the sensor is installed, the hexagonal seat 16 is tightly screwed by using a glove to hold the hexagonal seat 16, and a large stress generated in the process can not be transmitted to the elastic body 2 and the strain beam 1 (the stress isolation groove 14 isolates the transmission of the stress), so that the sensor is protected from the external stress to the maximum extent. If the influence of the external stress exists, the sensor can generate a large stability error, and the measurement precision and the long-term stability of the sensor are influenced.

In a preferred embodiment, the elastic body 2 is welded on the boss position of the pressure guiding nozzle 15, the conditioning circuit board 12 is installed above the elastic body, and the conditioning circuit board 12 conditions the input sensor signal, so that the sensor outputs a standard analog signal or digital signal, which is convenient for the user to use.

In one embodiment, the pad signal on the strain beam 1 Hui Shitong bridge is connected to the conditioning circuit through a signal line.

Through detection, the indexes of the high-temperature constant-elasticity alloy nano-film pressure sensor in the embodiment are shown in table 2.

TABLE 2

As can be seen from table 2, the high-temperature constant-elasticity alloy nano-film pressure sensor prepared by the method has the advantages of large working temperature range, high sensitivity and good stability.

In summary, the high-temperature constant-elasticity alloy material and the process for preparing the strain beam, the assembly structure of the strain beam and the elastomer and the pressure sensor are provided. Has the following advantages:

2. Strain roof beam 1 and elastomer 2 are obtained through this application high temperature constant elasticity alloy material preparation, weld it, and subsequent processing need not to carry out the grinding polishing to the elastic diaphragm 8 of elastomer 2, consequently can not receive the surface depression puzzlement.

3. The pressure sensor which consists of the strain beam 1 and the elastic body 2 made of the high-temperature constant-elasticity alloy material and other parts has the advantages of large working temperature range, high sensitivity and good stability.

The embodiments described above are some, but not all embodiments of the present application. The detailed description of the embodiments of the present application is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Claims

1. The assembly structure of the strain beam and the elastic body is characterized by comprising the elastic body and the strain beam, wherein the elastic body is made of a high-temperature constant-elasticity alloy material;

the strain beam comprises a strain diaphragm, a left side column, a right side column, a central column and a groove, the elastic body comprises side parts, a central groove, an elastic diaphragm and a circular island, the strain diaphragm positioned above and the groove positioned below are formed between the left side column and the central column and between the central column and the right side column, the elastic diaphragm is formed between the upper ends of the side parts and positioned above the central groove, the circular island is arranged in the middle of the lower end of the elastic diaphragm, the lower end of the left side column and the lower end of the right side column are both attached to the upper end of the side parts, and the lower end of the central column is attached to the upper end of the elastic diaphragm;

the high-temperature constant-elasticity alloy material comprises the following raw materials in percentage by mass: 6.9 to 12.9 percent of Ti, 1 to 5 percent of Al, 27 to 41 percent of Ni, 0.7 to 5.6 percent of V, 0.45 to 5.6 percent of Nb, 0.6 to 3 percent of Co, 0.6 to 3.9 percent of Cr, 2.9 to 6.5 percent of Mo + W, 0.1 to 0.6 percent of Cu, 0.04 to 0.22 percent of Ag, 0 to 0.03 percent of C, 0.1 to 0.65 percent of Si, 0 to 0.01 percent of S, 0 to 0.01 percent of P, 0 to 0.05 percent of Mn, 0.02 to 0.38 percent of Ce + La, 1.2 to 3.3 percent of Ru + Ir and the balance of Fe.

2. The structure of assembling a strain beam and an elastic body according to claim 1, wherein the process for preparing the strain beam comprises the following steps:

preparing a high-temperature constant-elasticity alloy material, machining bilaterally symmetrical grooves on the back of the material by a mechanical method, and reserving the thickness of a strain membrane when machining the grooves;

grinding and polishing the upper surface of the material with the processed groove to ensure that the surface roughness of the material meets the requirement;

depositing an insulating layer, a sensitive layer and a pad layer film on the surface of the ground and polished material by using a physical or chemical method, and manufacturing a Whitman bridge pattern by using a photoetching technology;

mechanical methods are used to separate the material into individual strain beams.

3. The structure of assembling a strain beam and an elastic body according to claim 2, wherein the roughness is Ra ≦ 10nm.

4. A structure for assembling a strain beam and an elastic body according to claim 2, wherein the thickness of the strain film is 0.09-0.67mm.

5. The structure of assembling a strain beam and an elastic body according to claim 1, wherein the central column corresponds to the circular island up and down.

6. An assembly structure of a strain beam and an elastic body according to claim 1, wherein the thickness of the elastic membrane is 0.09-0.67mm.

7. A pressure sensor comprising the mounting structure of any one of claims 1 to 6, further comprising a housing, a pressure introduction nozzle, a conditioning circuit board, a lead wire, and a pressure introduction hole, characterized in that: the shell is connected with the pressure guiding nozzle, a conditioning circuit board is arranged in the shell, the lead is connected with the conditioning circuit board, the lead penetrates through the shell and the conditioning circuit board and is connected with a Hui Shitong electric bridge on the strain beam, the lower end of the elastic body is arranged on the pressure guiding nozzle and is welded in a sealing mode, and a pressure guiding hole in the pressure guiding nozzle is opposite to a slotted hole of the elastic body.

8. The pressure sensor of claim 7, wherein the pressure nozzle is provided with an external thread at a front end and a hexagonal seat at a rear end.