JPS61194306A - Shape inspecting apparatus - Google Patents

Abstract

PURPOSE:To enable detection of defective tendency of a specimen, by indicating a defective part of the specimen by obtaining OR else between a 2-dimensional pattern and the standard 2-dimensional pattern of the specimen. CONSTITUTION:A specimen 2-dimensional pattern is generated by image- processing of an image pick-up signal from a camera 12 through a specimen pattern forming means. And a specimen 2-dimensional pattern 22 and the standard 2 dimensional pattern 24 previously stored in a memory b are made to be displayed on the CRT20 and, the OR ELSE is taken by comparing and checking both patterns per each image element and consequently, when judgment is given to the effect that a number of different image elements exceeds that of allowable image elements, than a shape of different part 26 of both patterns 22, 24 only is displayed on the CRT20 and it is displace as unacceptable at lower right on the CRT20. By this arrangement, a defective part of the specimen can easily be detected.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a shape inspection apparatus that images an object to be inspected with a camera and inspects the shape of the object.

[Prior Art] Conventionally, in this type of shape inspection apparatus, a two-dimensional pattern of the object to be inspected is created by image processing an image signal obtained by conveying an image of the object to be inspected by a camera, and the two-dimensional pattern of the object to be inspected is In addition to calculating the number of pixels forming a predetermined standard two-dimensional pattern, it is compared with the number of pixels forming a predetermined standard two-dimensional pattern, and it is determined whether the difference in the number of pixels forming both two-dimensional patterns is within a predetermined number of pixels. Only the good or bad quality of the inspected object was displayed.

[Problems to be Solved by the Invention] As described above, the number of pixels forming the two-dimensional pattern of the object to be inspected is compared with the number of pixels forming the standard two-dimensional pattern, and only the good and defective objects of the object to be inspected are determined. In the case of a device that displays a mark, it is only possible to inspect whether the inspected object itself is good or defective, but it is not possible to detect the defective part of the inspected object, and even if a large number of inspected objects are inspected, There were problems such as the inability to detect trends or causes of defects.

[Purpose of the Invention] The present invention solves the above-mentioned conventional problems, and is capable of detecting defective tendencies of inspected objects, elucidating the causes of defects, and improving processing steps of inspected objects before inspection. The purpose of the present invention is to provide a shape inspection device that allows countermeasures to be taken.

[Means and operations for solving the problems] In order to achieve the above object, the present invention provides an object patterning means for image processing the m-image signal from the camera 12, as shown in FIG. Calculating means C for comparing and collating the two-dimensional pattern of the inspected object created in step a with the standard two-dimensional pattern stored in the storage means is provided, and display means d for displaying the result on a display section is provided. , the standard two-dimensional pattern and the two-dimensional pattern of the object to be inspected are compared and matched pixel by pixel by the calculation means C to obtain an exclusive OR, and from the exclusive OR, the display means d displays only the differences between the two patterns. is displayed on the display section.

[Embodiment] An embodiment embodying the present invention will be described in detail below with reference to FIGS. 2 to 7.

The shape inspection device includes a table (not shown) that holds the object to be inspected 10 at a predetermined position, a camera 12 disposed above the object to be inspected, and a microcomputer 18 connected to the camera 12. , and a CRT 20 as a display section connected to the microcomputer 18. The microcomputer 18 is composed of a central processing unit (hereinafter referred to as CPU) 14 and a memory 16 in which various data such as a control program and standard two-dimensional pattern data of the object 10 to be inspected are stored. Said C
A positioning completion detection switch 19 disposed near the inspection object holding position on the table is connected to the PU 14, and when the inspection object 10 is positioned at the inspection object holding position on the table, the positioning completion detection switch 19 is connected. The switch 19 is activated and the detection signal thereof is input to the CPU 14.

This shape inspection device detects the shape of the upper end surface of an object to be inspected 10, which is composed of a silvery white cylindrical upper part 10a and a black cylindrical lower part 10b having a larger diameter than the upper part 10a, as shown in FIG. It is something to be inspected.

Next, the operation of this embodiment will be explained according to the flowchart shown in FIG.

When the power is turned on, the CPU 14 is operated according to the control program, first executes step SO, and outputs when the object 10 to be inspected is positioned at the object holding position on the table, that is, at the imaging position of the camera 12. It is checked whether there is a detection signal from the positioning completion detection switch 19.

Here, when the inspected object 10 is positioned at the inspected object holding position on the table by an appropriate transfer robot (not shown), the positioning completion detection switch 19 is activated and a detection signal is input to the CPU 14. The CPU 14 executes the next step S1. In step S1, the CPU
14 inputs an image signal of the object to be inspected 10 imaged by the camera 12, and binarizes the image signal to separate the bright upper surface of the object to be inspected from other dark parts. A two-dimensional pattern 22 is created, and the two-dimensional pattern 22 of the object to be inspected is stored in a predetermined area in the memory 16. Next, step $2 is executed, and the two-dimensional pattern 22 of the object to be inspected and the standard two-dimensional pattern 24 stored in advance in the memory 16 are displayed in ORR2O3 as shown in FIG. Each pixel is compared and compared, and as shown in FIG. 4, an exclusive OR is taken of the results and the result is stored in a predetermined area in the memory 16 as display data.

Next, in step S3, the number of pixels that are "bright" as a result of taking the exclusive OR, that is, the number of different pixels where the two-dimensional pattern 22 of the object to be inspected and the standard two-dimensional pattern 24 do not match is counted. Then, in step S4, it is determined whether the number of different pixels is within the allowable number of pixels. If it is determined that the number of different pixels is greater than the allowable number of pixels, step S6 is executed, and as shown in FIG. , "defective product" is displayed at the bottom right of the CRT 20. Further, if it is determined that the number of different pixels is within the allowable number of pixels, step S5 is executed, and the shape of the different part 26 is displayed as in step S6, and "good product" is displayed at the lower right corner of the CRT 20. .

[Effects of the Invention] As detailed above, the present invention calculates an exclusive OR between the two-dimensional pattern of the object to be inspected and the standard two-dimensional pattern, and determines the defective portion of the object from the exclusive OR. By displaying the following information, it is possible to easily detect the defective parts of the inspected object and detect the tendency of the defect. This has the effect of making it easier to take countermeasures.

[Brief explanation of the drawing]

Fig. 1 is a diagram corresponding to the claims of the present invention, Fig. 2 is a block diagram showing the circuit configuration of an embodiment of the invention, Fig. 3 is a flowchart explaining the operation, and Fig. 4 is a diagram showing the two-dimensional pattern of the object to be inspected. A diagram showing the display format of exclusive OR with a standard two-dimensional pattern, FIG. 5 is a perspective view of the object to be inspected, and FIG. 6 is a CR
FIG. 7 is a diagram showing the two-dimensional pattern of the object to be inspected and the standard two-dimensional pattern displayed on the CRT, and FIG. 7 is a diagram showing the shapes of the different portions of the two patterns displayed on the CRT. In the figure, 10 is the object to be inspected, 12 is the camera, and 20 is the CRT (
22 is a two-dimensional pattern of the object to be inspected, and 24 is a standard two-dimensional pattern.

Claims (1)

[Scope of Claims] In a shape inspection device that images an object to be inspected (10) with a camera (12) and inspects the shape of the object (10), the image processing is performed on an image signal from the camera (12). an inspection object patterning means (a) for creating an inspection object two-dimensional pattern (22), and a storage means (b) for storing a standard two-dimensional pattern (24) of the inspection object (10); a calculation means (c) for comparing and collating the standard two-dimensional pattern (24) and the inspection object two-dimensional pattern (22) for each pixel and calculating their exclusive OR; display means (d) for displaying only the difference between the two-dimensional pattern (22) of the object to be inspected and the standard two-dimensional pattern (24) on the display section (20) from the exclusive OR obtained by A shape inspection device characterized by: