JPS61192446A - Correction of thermal displacement of numerical control machine tool - Google Patents

Correction of thermal displacement of numerical control machine tool

Info

Publication number
JPS61192446A
JPS61192446A JP3379485A JP3379485A JPS61192446A JP S61192446 A JPS61192446 A JP S61192446A JP 3379485 A JP3379485 A JP 3379485A JP 3379485 A JP3379485 A JP 3379485A JP S61192446 A JPS61192446 A JP S61192446A
Authority
JP
Japan
Prior art keywords
temperature
thermal displacement
amount
spindle head
machine tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3379485A
Other languages
Japanese (ja)
Inventor
Masami Katayanagi
片柳 正美
Naohiro Ikeda
直弘 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niigata Engineering Co Ltd
Original Assignee
Niigata Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Niigata Engineering Co Ltd filed Critical Niigata Engineering Co Ltd
Priority to JP3379485A priority Critical patent/JPS61192446A/en
Publication of JPS61192446A publication Critical patent/JPS61192446A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/12Adaptive control, i.e. adjusting itself to have a performance which is optimum according to a preassigned criterion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automatic Control Of Machine Tools (AREA)

Abstract

PURPOSE:To correct the relative position between a workpiece and a tool by detecting the temperature of the heating part related to the thermal displacement and the temperature of the underground or the ground surface and calculating the thermal displacement amount corresponding to the temperature difference. CONSTITUTION:The temperature of a spindle head 5 is detected by the first temperature detector 14, and the temperature of the ground surface as standard is detected by the second temperature detector 17. A displacement-amount calculating circuit 25 calculates the thermal displacement amount DELTAZ1 due to the rise of the temperature of the spindle head 5 on the basis of each detected temperature T1, T2 and each coefficient (a1), (b1) obtained by a coefficient setting circuit 26. The thermal displacement amount DELTAZ1 is taken into a numerical control apparatus 27 by the correction allowable signal supplied from the NC apparatus 27. The NC apparatus 27 corrects the relative displacement between a tool T and a work 10 due to the rise of the temperature of the spindle head 5 on the basis of the thermal displacement amount DELTAZ1, and the work transfer amount corresponding to the temperature situation at this time is controlled. Therefore, the thermal displacement due to the temperature variation of the spindle head 5 is certainly corrected, and the working precision of the work 10 can be maintained.

Description

【発明の詳細な説明】 「産業上の利用分野」 本発明は、数値制御工作機械において、工作物の加工精
度を低下させる熱変位を補正する熱変位補正方法に関す
る。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a thermal displacement correction method for correcting thermal displacement that degrades the machining accuracy of a workpiece in a numerically controlled machine tool.

「従来の技術」 従来、この種の補正方法としては、工作機械の発熱部C
例えば主軸頭)の温度と、工作機械のベース部の温度あ
るいは大気温度とをそれぞれ測定して、これらの温度の
差に応じて、温度差−熱変位関係式を利用して熱変位を
算出して補正するものが知らnでいるl特開昭57−3
3938号公報、特開昭58−132441号公報、特
開昭58−160042号公報)。
``Prior art'' Conventionally, this type of correction method has been used to
For example, the temperature of the spindle head) and the temperature of the base of the machine tool or the atmospheric temperature are measured, and the thermal displacement is calculated using the temperature difference-thermal displacement relational expression according to the difference between these temperatures. I don't know what to do to correct it.
3938, JP 58-132441, JP 58-160042).

「発明が解決しようとする問題点」 しかしながら、上記のように大気温(室温)あるいは工
作機械のベース部の温度と発熱部の温度との温度差に応
じて熱変位を算出し補正を行なうJ5にする場会にに、
機械設置場所周囲の環境条件や機械運転条件に左右さ几
易く、安定性に欠け、十分な補正精度が得られないとい
う問題がある。
"Problem to be solved by the invention" However, as mentioned above, thermal displacement is calculated and corrected according to the atmospheric temperature (room temperature) or the temperature difference between the temperature of the base part of the machine tool and the temperature of the heat generating part. In the event of
There are problems in that it is easily influenced by the environmental conditions around the machine installation location and the machine operating conditions, lacks stability, and cannot obtain sufficient correction accuracy.

そこで、本発明者等が、工作機械設置場所各部の温度変
化を実測し九績果、第7図に示すように、地表面(もし
くは地中)の温度が室温あるいは工作機械温度に比べて
安定していることがわかつ九。
Therefore, the inventors of the present invention actually measured the temperature changes in various parts of the machine tool installation location, and as a result, as shown in Figure 7, the temperature on the ground surface (or underground) is stable compared to room temperature or machine tool temperature. 9. I can see what's going on.

なお、第7図は、主軸を300 Orpm  で回転さ
せた時の時間的変化を示し次2つの実測例であり、図中
aは実測例の地我温度、bは実測例の室温、0は実測例
の工作機械温度である。
In addition, Fig. 7 shows the temporal change when the main shaft is rotated at 300 rpm, and shows the following two actual measurement examples. In the figure, a is the ground temperature in the actual measurement example, b is the room temperature in the actual measurement example, and 0 is the This is the actual measured machine tool temperature.

本発明は、上記事情に鑑みてなさfしたもので、その目
的とするところは、機械設置場所周囲の環境条件や機械
運転条件に左右されることなく、発熱部の温度変化に対
応して、精度良(熱変位の補正を行なうことができる数
値制御工作機械の熱変位補正方法を提供することにある
The present invention has been made in view of the above circumstances, and its purpose is to respond to temperature changes in heat generating parts without being influenced by the environmental conditions around the machine installation location or the machine operating conditions. The object of the present invention is to provide a thermal displacement correction method for a numerically controlled machine tool that can perform thermal displacement correction with high accuracy.

「間1点を解決するための手段」 上記目的を達成するために、本発明は、熱変位と密接に
関係する発熱部の温度と、地中あるいは地表面の温度と
をそnぞA検出して、これらの温度差に応じて熱変位量
を算出し、この熱変位量に基づいて工作物と工具との間
の相対位置を補正するものである6、 「8温抱例」 以下、第1図ないし第4図に基づいて本発明の一実施例
を説明する。
"Means for Solving the Problem" In order to achieve the above object, the present invention detects the temperature of the heat generating part, which is closely related to thermal displacement, and the temperature underground or on the ground surface. Then, the amount of thermal displacement is calculated according to these temperature differences, and the relative position between the workpiece and the tool is corrected based on this amount of thermal displacement6. An embodiment of the present invention will be described based on FIGS. 1 to 4.

図中1は、工作機械2のペースであり、このペースl上
には、コラム3が設けらnて督り、このコラム3は、ペ
ース1の端部に設置されたコラム駆動用のサーボモータ
4に工っで、2軸(第1図において左右)方向に移動す
る2つに構成されている。また、コラム3には、主軸類
5が投けらnて督り、この主軸頭5は、コラム3の上部
に設置書九土サーボモータ6によって、Yll!I(第
1図にお贋で上下)方向に移動するようになっている。
In the figure, 1 is the pace of the machine tool 2. A column 3 is provided on this pace 1, and this column 3 is driven by a servo motor for driving the column installed at the end of the pace 1. 4, it is configured into two parts that move in two axes (left and right in FIG. 1). Further, a spindle 5 is mounted on the column 3, and the spindle head 5 is operated by a servo motor 6 installed at the top of the column 3. It is designed to move in the I direction (up and down in Figure 1).

そして、主軸型5には、主軸モータ7によって回転せし
ぬられる主軸8が設けらユており、この主軸SVCは、
テーブル9上の工作物10を加工する工具TtrS挿着
さするようになっている。さらに、上記テーブル9く、
ベースlの一対の案内レール11に嵌め込ままたテーブ
ル基台12上に載置されており、このテーブル基台12
は、ベース1に設けられたテーブル駆動用のサーボモー
タ13によって、X軸(第1図において紙面に垂直)方
向に移動する;うになっているう 上記主軸頭5に嫁、第1温度検出器14が設置されてい
る。、17?、、上記工作機械2が設置されている床1
5の適宜位置には、!igz図に示すように、凹部16
が形成さnており、この凹部16内には、基準温度とす
る地表面(地中)の温度を検出するt42温度検世91
17が配投畜れている。そして、この@22温検出器1
7を収容し九凹部16には蝙銅等の熱伝導率が良好な良
導部材18が充填さnており、がつ凹部16の上面にに
、該凹部16を覆って、Vr熱#19力S投けらnでい
る。
The main shaft type 5 is provided with a main shaft 8 that is rotated by a main shaft motor 7, and this main shaft SVC is
A tool TtrS for machining a workpiece 10 on the table 9 is inserted therein. Furthermore, the above table 9
The base l is fitted into a pair of guide rails 11 and placed on a table base 12.
is moved in the X-axis direction (perpendicular to the plane of the paper in FIG. 1) by a servo motor 13 for driving the table provided on the base 1; 14 have been installed. , 17? ,,floor 1 on which the machine tool 2 is installed
In the appropriate position of 5,! As shown in the igz diagram, the recess 16
is formed, and inside this recess 16 is a temperature measurement 91 for detecting the temperature of the ground surface (underground), which is used as a reference temperature.
17 is out of stock. And this @22 temperature detector 1
The concave part 16 containing Vr heat #19 is filled with a good conductive material 18 having good thermal conductivity such as copper, and the upper surface of the concave part 16 is covered with Vr heat #19. I am a force S thrower n.

上記各第1%第2−に検出器14.17は、熱変位補正
装置20の一対の増幅器21.22及びA/D変換器(
アナログデイジメル変換器)23゜24を介して、それ
ぞn変位!i演算回路25に電気的に接続さt’してか
り1また、・この変位量演算回路25VCは、係数設定
回路26が接続されている。
The above-mentioned 1st and 2nd detectors 14.17 each include a pair of amplifiers 21.22 and an A/D converter (
Analog Digimel converter) via 23°24, respectively n displacement! This displacement amount calculation circuit 25VC is electrically connected to the calculation circuit 25. A coefficient setting circuit 26 is connected to the displacement calculation circuit 25VC.

そして、y位置演算回路25は、堵6器21゜A/D変
換器23を介して入力された第1温度検出器14の検出
値T、と増幅器22 、A / D変換器2411r:
介して入力づn’pc第2温度検出器17の検出値T2
 及び係数設定回路26に設定された係数a +  h
 b r  をsz位量の算定式Δz1=’l ’ C
T1−  T2”blに代入して、熱変位量を算出する
The y-position calculation circuit 25 then calculates the detected value T of the first temperature detector 14 inputted via the 6-device 21 degree A/D converter 23, the amplifier 22, and the A/D converter 2411r:
The detected value T2 of the second temperature detector 17 is input via
and the coefficient a + h set in the coefficient setting circuit 26
Calculation formula for sz quantity Δz1='l' C
The amount of thermal displacement is calculated by substituting T1-T2''bl.

ここで、実際の熱変位量は、Δ2=α・rTl−To)
・Lで衣わぜ(αは線膨張率1/ ’as ’ Lは被
測定物の長さμm  l、小つ、上記第2温度検出器1
7の検出値で の変動が少なく、初期温度T。にほぼ等
ま しいとみなぜるので、係数& 1*  h 1  を適
当に選択す九ば、上記算出した熱変位量Δz1 と実際
の熱変位量Δ2は近似的に一致する。上記各係数& 1
a b 1  は、あらかじめ実験的に求めておき、必
要に応じて上記係数設定回路26に設定するようにする
Here, the actual amount of thermal displacement is Δ2=α・rTl−To)
- Depends on L (α is the coefficient of linear expansion 1/'as' L is the length of the object to be measured μm l, small, the above second temperature detector 1
There is little variation in the detected value of 7, and the initial temperature T. Therefore, by appropriately selecting the coefficient &1*h1, the calculated thermal displacement amount Δz1 and the actual thermal displacement amount Δ2 approximately match. Each coefficient above & 1
a b 1 is determined experimentally in advance and set in the coefficient setting circuit 26 as necessary.

このようにして算出された変位量演算回路25の出力(
補正量)社、数値制御装置27〃島らの補正許可信号に
基づいて数値制御装置27に取り込まnるようになって
いる。ま次、数値制御装置27は、テープによる指令?
各そ一タ4,6.7゜13に伝えて自動運転にて工作物
lOの加工制御を行なうものである、 次に、上記のように構成され九熱変位補正装蓋f用いて
、本発明の熱変位補正方法を説明する。
The output of the displacement calculation circuit 25 calculated in this way (
The amount of correction is taken into the numerical control device 27 based on the correction permission signal from Shima et al. Next, is the numerical control device 27 commanded by tape?
This is to control the machining of the workpiece lO in automatic operation by transmitting the information to the respective parts 4, 6.7゜13. The thermal displacement correction method of the invention will be explained.

数値制御装置27カS、あらかじめ入力されているテー
プ指令に基づいて、各モータ4.6.7゜13を制御し
て、工作物10を、主軸8の先端に挿着さ、rt穴工具
TlICよF)加工してい(と、主軸8の回転(伴い、
主軸8用の軸受等が発熱することによって、主軸頭5の
温度が上昇し始める。この時、主軸頭5の温には、第1
@度検出器14によって検出されていると共に、基準と
なる地表面の温度がwJ2温度検出器17によって検出
されており、各増幅器21,22、A/D変換器23゜
24f介して各温度検出器14.17の検出値T1 #
 T2  が変位量演算回路25に入力さ几ているから
、この変位量演算回路25は、上記各検出値T1jT2
 及び係数設定回路26からの各係数a1. 、b、 
 に基づrて、主軸頭5の1匠上昇による#1変位貴Δ
z1 f演算している。そして、この熱変位量Δz1 
は、数値制御装fi27からの補正許可信号によって、
数値制御装置27に取り込ま几て、この熱変位量(補正
量)Δz1 に基づいて、数値制御装置27は、主軸W
R5の温度上昇による工具Tと工作物10との相対変位
を補正して、その時の1変状況に応じた加工移動量が制
御される。
The numerical control device 27 controls each motor 4.6.7° 13 based on the tape command input in advance, inserts the workpiece 10 into the tip of the spindle 8, and inserts the workpiece 10 into the tip of the spindle 8. (F) machining (and the rotation of the spindle 8 (accompanied by
As the bearings for the spindle 8 generate heat, the temperature of the spindle head 5 begins to rise. At this time, the temperature of the spindle head 5 is
At the same time, the reference ground surface temperature is detected by the wJ2 temperature detector 17, and each temperature is detected via the amplifiers 21 and 22 and the A/D converters 23 and 24f. Detection value T1 of device 14.17 #
Since T2 is input to the displacement amount calculation circuit 25, this displacement amount calculation circuit 25 calculates each of the above detected values T1jT2.
and each coefficient a1. from the coefficient setting circuit 26. ,b,
Based on r, #1 displacement value Δ due to one rise of spindle head 5
z1 f is being calculated. Then, this thermal displacement amount Δz1
is determined by the correction permission signal from the numerical control device fi27.
Based on this thermal displacement amount (correction amount) Δz1, the numerical control device 27 adjusts the main shaft W.
The relative displacement between the tool T and the workpiece 10 due to the temperature rise of R5 is corrected, and the machining movement amount is controlled according to the one-change situation at that time.

従って、主軸頭5の温度変化による熱変位が確実に補正
され、工作物10の加工精度の低下を招くことが1い。
Therefore, the thermal displacement caused by the temperature change of the spindle head 5 is reliably corrected, and the machining accuracy of the workpiece 10 does not deteriorate.

上記効果を示すものが、wIJ4図の熱変位量の時間変
化を表わし次特性図であり、この図は、主軸8をsj!
際の加工状態に即し九運転条件【第3図参照)に苓づい
て回転させt際に、本発明の方法により補正を行なつ九
場合IAIと補正を行なわなかつ九場合(Blの主軸端
部の熱変位量を比較し九本のである。図からも明らかな
ように、本発明の補正方法を用いると、熱変位tが大幅
に低減さ几ていることがわかる。
The above effect is shown in the following characteristic diagram showing the temporal change in the amount of thermal displacement in diagram wIJ4.
When rotating under the operating conditions (see Figure 3) according to the current machining state, correction is performed using the method of the present invention. As is clear from the figure, when the correction method of the present invention is used, the thermal displacement t is significantly reduced.

なお、上記!i!捲例においては、第2温度検出器17
を地表[iに設置した場合について説明し九が、第5図
に示すように、床15に、上記凹部16の代わりに、該
凹部16エシ深い検出穴30を穿設べ・1、 し、かつ検出穴30の下部に上記第2@度検出器17及
び該第2温度検出器171に被覆する良導部材18を設
置すると共に、空気層31を介して、上記検出穴30の
上部を断熱材32で覆つ友構成や、第6図に示すように
、上記空気層31及び断熱材32の代わりに、上記床1
5と同等材料本しくに断熱材料からなる充填部材33を
投けた構成でもよい。
In addition, the above! i! In the winding example, the second temperature detector 17
9. As shown in FIG. 5, a deep detection hole 30 should be bored in the floor 15 in place of the recess 16 in the recess 16. In addition, a good conductivity member 18 covering the second temperature sensor 17 and the second temperature sensor 171 is installed at the lower part of the detection hole 30, and the upper part of the detection hole 30 is insulated through the air layer 31. As shown in FIG. 6, instead of the air layer 31 and the heat insulating material 32,
It is also possible to use a structure in which a filling member 33 made of a heat insulating material is essentially made of a material equivalent to No. 5.

「発明の効果」 以上説明し比ように、本発明は、熱変位と密接に関係す
る発熱部の温度と、地中あるいは地表面の温度とをそれ
ぞれ検出して、これらの温度差に応じて熱変位fiを算
出し、この熱変位量に基づいて工作物と工具どの間の相
対位置を補正するものである牟ら、周囲の環境条件や機
械の運転条件に左右されず安定している地中あるいは地
表面の温度を基準として発熱部との温度差を熱変位量に
変換することによって、熱変形による工作物と工作機械
に挿着さtt:e工具との相対位置の変動?確実に補正
でき、工作物の加工精度を良好な状態に維持できて、不
良品力S生じることがなく、製品の歩留りが向上すると
いう優nた効果を有する。
"Effects of the Invention" As explained above, the present invention detects the temperature of the heat generating part, which is closely related to thermal displacement, and the temperature underground or on the ground surface, and detects the temperature according to the difference between these temperatures. This method calculates the thermal displacement fi and corrects the relative position between the workpiece and the tool based on this amount of thermal displacement. By converting the temperature difference between the heat generating part and the heat generating part based on the temperature inside or on the ground surface into the amount of thermal displacement, changes in the relative position between the workpiece and the tool inserted into the machine tool due to thermal deformation. This method has excellent effects in that it can be reliably corrected, the machining accuracy of the workpiece can be maintained in a good state, no defective products are produced, and the yield of products is improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の補正方法を実施する数値制御工作機械
の概略構成図、第2図は第2温度検出器の設置状iIを
示す断面図1.第3図は主軸の運転条件を示す特性図、
第4図は肩3図の運転条件下における熱変位量の特性図
、第5図は第2温度検出器の他の81状態を示す断面図
、第6図は第2温度検出器の、別の設置状、轢を示す断
面図、第7図は工作機械を設置した場所の各部の温度の
時間的変化を示す特性図である。 5・・・、・・・主軸頭、10・・・・・・工作物、1
4・・・・・・tlX1温度検出器、17・・・・・・
第2温度検出器、T・・・・・・工具、Δz1 ・・・
・・・熱変位量(補正量)。
FIG. 1 is a schematic configuration diagram of a numerically controlled machine tool that implements the correction method of the present invention, and FIG. 2 is a sectional view showing the installation state iI of the second temperature sensor. Figure 3 is a characteristic diagram showing the operating conditions of the main shaft.
Fig. 4 is a characteristic diagram of the amount of thermal displacement under the operating conditions shown in Fig. 3, Fig. 5 is a sectional view showing the other 81 states of the second temperature sensor, and Fig. 6 is a diagram showing the other 81 states of the second temperature sensor. FIG. 7 is a sectional view showing the installation condition and track of the machine tool, and FIG. 7 is a characteristic diagram showing temporal changes in temperature of various parts of the place where the machine tool is installed. 5... Spindle head, 10... Workpiece, 1
4...tlX1 temperature sensor, 17...
Second temperature detector, T... Tool, Δz1...
...Thermal displacement amount (correction amount).

Claims (1)

【特許請求の範囲】[Claims] 主軸頭など熱変位と密接に関係する発熱部の温度と、地
中あるいは地表面の温度とをそれぞれ検出して、これら
の温度差に応じて熱変位量を算出し、この熱変位量に基
づいて工作物と工具との間の相対位置を補正することを
特徴とする数値制御工作機械の熱変位補正方法。
The temperature of heat-generating parts that are closely related to thermal displacement, such as the spindle head, and the temperature of the ground or the ground surface are detected, and the amount of thermal displacement is calculated according to the difference between these temperatures, and based on this amount of thermal displacement. A thermal displacement correction method for a numerically controlled machine tool, the method comprising: correcting the relative position between a workpiece and a tool.
JP3379485A 1985-02-22 1985-02-22 Correction of thermal displacement of numerical control machine tool Pending JPS61192446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3379485A JPS61192446A (en) 1985-02-22 1985-02-22 Correction of thermal displacement of numerical control machine tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3379485A JPS61192446A (en) 1985-02-22 1985-02-22 Correction of thermal displacement of numerical control machine tool

Publications (1)

Publication Number Publication Date
JPS61192446A true JPS61192446A (en) 1986-08-27

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JP3379485A Pending JPS61192446A (en) 1985-02-22 1985-02-22 Correction of thermal displacement of numerical control machine tool

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897171A (en) * 1985-11-26 1990-01-30 Tadahiro Ohmi Wafer susceptor
JPH02298456A (en) * 1989-05-09 1990-12-10 Kinugasa Seisakusho:Kk Temperature compensator for machine tool
KR100970557B1 (en) 2003-12-29 2010-07-16 두산인프라코어 주식회사 The Main Axis Heat Displacement Correction Unit of CND and Method Thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132441A (en) * 1982-01-25 1983-08-06 Yamazaki Mazak Corp Automatic compensator for thermal displacement

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132441A (en) * 1982-01-25 1983-08-06 Yamazaki Mazak Corp Automatic compensator for thermal displacement

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4897171A (en) * 1985-11-26 1990-01-30 Tadahiro Ohmi Wafer susceptor
JPH02298456A (en) * 1989-05-09 1990-12-10 Kinugasa Seisakusho:Kk Temperature compensator for machine tool
KR100970557B1 (en) 2003-12-29 2010-07-16 두산인프라코어 주식회사 The Main Axis Heat Displacement Correction Unit of CND and Method Thereof

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