JPS61191474U - - Google Patents
Info
- Publication number
- JPS61191474U JPS61191474U JP7561585U JP7561585U JPS61191474U JP S61191474 U JPS61191474 U JP S61191474U JP 7561585 U JP7561585 U JP 7561585U JP 7561585 U JP7561585 U JP 7561585U JP S61191474 U JPS61191474 U JP S61191474U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- bell gear
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985075615U JPH047189Y2 (https=) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985075615U JPH047189Y2 (https=) | 1985-05-21 | 1985-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61191474U true JPS61191474U (https=) | 1986-11-28 |
| JPH047189Y2 JPH047189Y2 (https=) | 1992-02-26 |
Family
ID=30617000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985075615U Expired JPH047189Y2 (https=) | 1985-05-21 | 1985-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047189Y2 (https=) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5223571A (en) * | 1975-08-19 | 1977-02-22 | Toshiba Corp | Vapor phase reaction apparatus |
| JPS599083U (ja) * | 1982-07-07 | 1984-01-20 | 東芝機械株式会社 | 気相成長装置 |
| JPS5983031U (ja) * | 1982-11-27 | 1984-06-05 | 東芝機械株式会社 | 縦型気相成長装置 |
-
1985
- 1985-05-21 JP JP1985075615U patent/JPH047189Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5223571A (en) * | 1975-08-19 | 1977-02-22 | Toshiba Corp | Vapor phase reaction apparatus |
| JPS599083U (ja) * | 1982-07-07 | 1984-01-20 | 東芝機械株式会社 | 気相成長装置 |
| JPS5983031U (ja) * | 1982-11-27 | 1984-06-05 | 東芝機械株式会社 | 縦型気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH047189Y2 (https=) | 1992-02-26 |