JPS61190872U - - Google Patents
Info
- Publication number
- JPS61190872U JPS61190872U JP7468885U JP7468885U JPS61190872U JP S61190872 U JPS61190872 U JP S61190872U JP 7468885 U JP7468885 U JP 7468885U JP 7468885 U JP7468885 U JP 7468885U JP S61190872 U JPS61190872 U JP S61190872U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- chamber
- intake
- burn
- damper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7468885U JPS61190872U (enExample) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7468885U JPS61190872U (enExample) | 1985-05-20 | 1985-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61190872U true JPS61190872U (enExample) | 1986-11-27 |
Family
ID=30615215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7468885U Pending JPS61190872U (enExample) | 1985-05-20 | 1985-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61190872U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010025920A (ja) * | 2008-06-18 | 2010-02-04 | Espec Corp | 環境試験装置 |
-
1985
- 1985-05-20 JP JP7468885U patent/JPS61190872U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010025920A (ja) * | 2008-06-18 | 2010-02-04 | Espec Corp | 環境試験装置 |