JPS61190133U - - Google Patents
Info
- Publication number
- JPS61190133U JPS61190133U JP7435085U JP7435085U JPS61190133U JP S61190133 U JPS61190133 U JP S61190133U JP 7435085 U JP7435085 U JP 7435085U JP 7435085 U JP7435085 U JP 7435085U JP S61190133 U JPS61190133 U JP S61190133U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- etching
- preparatory
- etching chamber
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 10
- 238000001020 plasma etching Methods 0.000 claims description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7435085U JPS61190133U (enExample) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7435085U JPS61190133U (enExample) | 1985-05-20 | 1985-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61190133U true JPS61190133U (enExample) | 1986-11-27 |
Family
ID=30614566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7435085U Pending JPS61190133U (enExample) | 1985-05-20 | 1985-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61190133U (enExample) |
-
1985
- 1985-05-20 JP JP7435085U patent/JPS61190133U/ja active Pending