JPS61189006U - - Google Patents
Info
- Publication number
- JPS61189006U JPS61189006U JP1305685U JP1305685U JPS61189006U JP S61189006 U JPS61189006 U JP S61189006U JP 1305685 U JP1305685 U JP 1305685U JP 1305685 U JP1305685 U JP 1305685U JP S61189006 U JPS61189006 U JP S61189006U
- Authority
- JP
- Japan
- Prior art keywords
- storage container
- substrate storage
- jig
- contact portion
- transportation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 210000000078 claw Anatomy 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305685U JPS61189006U (enExample) | 1985-01-31 | 1985-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305685U JPS61189006U (enExample) | 1985-01-31 | 1985-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61189006U true JPS61189006U (enExample) | 1986-11-25 |
Family
ID=30496703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1305685U Pending JPS61189006U (enExample) | 1985-01-31 | 1985-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61189006U (enExample) |
-
1985
- 1985-01-31 JP JP1305685U patent/JPS61189006U/ja active Pending