JPS61188152U - - Google Patents
Info
- Publication number
- JPS61188152U JPS61188152U JP7074785U JP7074785U JPS61188152U JP S61188152 U JPS61188152 U JP S61188152U JP 7074785 U JP7074785 U JP 7074785U JP 7074785 U JP7074785 U JP 7074785U JP S61188152 U JPS61188152 U JP S61188152U
- Authority
- JP
- Japan
- Prior art keywords
- light source
- light
- integrator
- optical axis
- irradiated object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Light Sources And Details Of Projection-Printing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7074785U JPS61188152U (US06633600-20031014-M00021.png) | 1985-05-15 | 1985-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7074785U JPS61188152U (US06633600-20031014-M00021.png) | 1985-05-15 | 1985-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61188152U true JPS61188152U (US06633600-20031014-M00021.png) | 1986-11-22 |
Family
ID=30607610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7074785U Pending JPS61188152U (US06633600-20031014-M00021.png) | 1985-05-15 | 1985-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61188152U (US06633600-20031014-M00021.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152411A (ja) * | 1987-09-17 | 1989-06-14 | Olympus Optical Co Ltd | 半導体露光装置の照明光学系 |
| JPH01259533A (ja) * | 1988-04-11 | 1989-10-17 | Nikon Corp | 露光装置 |
| WO2014188746A1 (ja) * | 2013-05-20 | 2014-11-27 | 山下電装株式会社 | ソーラシミュレータ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850510A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Ｉｃパタ−ン転写装置における照明光学系 |
| JPS5850511A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Ｉｃパタ−ン転写装置における照明光学系 |
| JPS60102737A (ja) * | 1983-11-10 | 1985-06-06 | Canon Inc | シヤツタ−装置 |
-
1985
- 1985-05-15 JP JP7074785U patent/JPS61188152U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850510A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Ｉｃパタ−ン転写装置における照明光学系 |
| JPS5850511A (ja) * | 1981-09-21 | 1983-03-25 | Mikasa Kk | Ｉｃパタ−ン転写装置における照明光学系 |
| JPS60102737A (ja) * | 1983-11-10 | 1985-06-06 | Canon Inc | シヤツタ−装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01152411A (ja) * | 1987-09-17 | 1989-06-14 | Olympus Optical Co Ltd | 半導体露光装置の照明光学系 |
| JPH01259533A (ja) * | 1988-04-11 | 1989-10-17 | Nikon Corp | 露光装置 |
| WO2014188746A1 (ja) * | 2013-05-20 | 2014-11-27 | 山下電装株式会社 | ソーラシミュレータ |
