JPS61187978U - - Google Patents

Info

Publication number
JPS61187978U
JPS61187978U JP7390485U JP7390485U JPS61187978U JP S61187978 U JPS61187978 U JP S61187978U JP 7390485 U JP7390485 U JP 7390485U JP 7390485 U JP7390485 U JP 7390485U JP S61187978 U JPS61187978 U JP S61187978U
Authority
JP
Japan
Prior art keywords
compressor
helium
flow rate
control mechanism
rate control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7390485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7390485U priority Critical patent/JPS61187978U/ja
Publication of JPS61187978U publication Critical patent/JPS61187978U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
JP7390485U 1985-05-17 1985-05-17 Pending JPS61187978U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7390485U JPS61187978U (enrdf_load_stackoverflow) 1985-05-17 1985-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7390485U JPS61187978U (enrdf_load_stackoverflow) 1985-05-17 1985-05-17

Publications (1)

Publication Number Publication Date
JPS61187978U true JPS61187978U (enrdf_load_stackoverflow) 1986-11-22

Family

ID=30613703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7390485U Pending JPS61187978U (enrdf_load_stackoverflow) 1985-05-17 1985-05-17

Country Status (1)

Country Link
JP (1) JPS61187978U (enrdf_load_stackoverflow)

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