JPS61186829U - - Google Patents

Info

Publication number
JPS61186829U
JPS61186829U JP6987085U JP6987085U JPS61186829U JP S61186829 U JPS61186829 U JP S61186829U JP 6987085 U JP6987085 U JP 6987085U JP 6987085 U JP6987085 U JP 6987085U JP S61186829 U JPS61186829 U JP S61186829U
Authority
JP
Japan
Prior art keywords
guide surface
stage
air
bearing guide
control means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6987085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6987085U priority Critical patent/JPS61186829U/ja
Publication of JPS61186829U publication Critical patent/JPS61186829U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP6987085U 1985-05-10 1985-05-10 Pending JPS61186829U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6987085U JPS61186829U (enrdf_load_stackoverflow) 1985-05-10 1985-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6987085U JPS61186829U (enrdf_load_stackoverflow) 1985-05-10 1985-05-10

Publications (1)

Publication Number Publication Date
JPS61186829U true JPS61186829U (enrdf_load_stackoverflow) 1986-11-21

Family

ID=30605949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6987085U Pending JPS61186829U (enrdf_load_stackoverflow) 1985-05-10 1985-05-10

Country Status (1)

Country Link
JP (1) JPS61186829U (enrdf_load_stackoverflow)

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