JPS62156425U - - Google Patents

Info

Publication number
JPS62156425U
JPS62156425U JP4599186U JP4599186U JPS62156425U JP S62156425 U JPS62156425 U JP S62156425U JP 4599186 U JP4599186 U JP 4599186U JP 4599186 U JP4599186 U JP 4599186U JP S62156425 U JPS62156425 U JP S62156425U
Authority
JP
Japan
Prior art keywords
stage
surface plate
movable
movable guides
stage section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4599186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4599186U priority Critical patent/JPS62156425U/ja
Publication of JPS62156425U publication Critical patent/JPS62156425U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP4599186U 1986-03-27 1986-03-27 Pending JPS62156425U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4599186U JPS62156425U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4599186U JPS62156425U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Publications (1)

Publication Number Publication Date
JPS62156425U true JPS62156425U (enrdf_load_stackoverflow) 1987-10-05

Family

ID=30865240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4599186U Pending JPS62156425U (enrdf_load_stackoverflow) 1986-03-27 1986-03-27

Country Status (1)

Country Link
JP (1) JPS62156425U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530547U (ja) * 1991-09-30 1993-04-23 京セラ株式会社 Ｘ−ｙテーブル
JP2006309654A (ja) * 2005-05-02 2006-11-09 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617341A (en) * 1979-07-23 1981-02-19 Nippon Telegr & Teleph Corp <Ntt> Alignment stage for step and repeat exposure
JPS6039044A (ja) * 1983-08-09 1985-02-28 Citizen Watch Co Ltd 微細送り機構を備えたｘｙテ−ブル

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617341A (en) * 1979-07-23 1981-02-19 Nippon Telegr & Teleph Corp <Ntt> Alignment stage for step and repeat exposure
JPS6039044A (ja) * 1983-08-09 1985-02-28 Citizen Watch Co Ltd 微細送り機構を備えたｘｙテ−ブル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530547U (ja) * 1991-09-30 1993-04-23 京セラ株式会社 Ｘ−ｙテーブル
JP2006309654A (ja) * 2005-05-02 2006-11-09 Psc Kk 気体制御回転移動装置及び気体制御アクチュエータ

Similar Documents

Publication Publication Date Title
JPS62156425U (enrdf_load_stackoverflow)
JPH01109818U (enrdf_load_stackoverflow)
JPH0210091U (enrdf_load_stackoverflow)
JPS61191820U (enrdf_load_stackoverflow)
JPH03120406U (enrdf_load_stackoverflow)
JPS6186419U (enrdf_load_stackoverflow)
JPS61105842U (enrdf_load_stackoverflow)
JPH0351940U (enrdf_load_stackoverflow)
JPH0356323U (enrdf_load_stackoverflow)
JPH01154549U (enrdf_load_stackoverflow)
JPH0377145U (enrdf_load_stackoverflow)
JPS61200837U (enrdf_load_stackoverflow)
JPS6375304U (enrdf_load_stackoverflow)
JPS5847449U (ja) 工作機械の切粉除去装置
JPH0272887U (enrdf_load_stackoverflow)
JPS62180597U (enrdf_load_stackoverflow)
JPS6355582U (enrdf_load_stackoverflow)
JPH01121536U (enrdf_load_stackoverflow)
JPH01154634U (enrdf_load_stackoverflow)
JPH0287590U (enrdf_load_stackoverflow)
JPS60117708U (ja) 縁折り装置
JPH0179533U (enrdf_load_stackoverflow)
JPH0286917U (enrdf_load_stackoverflow)
JPS6286818U (enrdf_load_stackoverflow)
JPH0234637U (enrdf_load_stackoverflow)