JPS61184971U - - Google Patents
Info
- Publication number
- JPS61184971U JPS61184971U JP7023285U JP7023285U JPS61184971U JP S61184971 U JPS61184971 U JP S61184971U JP 7023285 U JP7023285 U JP 7023285U JP 7023285 U JP7023285 U JP 7023285U JP S61184971 U JPS61184971 U JP S61184971U
- Authority
- JP
- Japan
- Prior art keywords
- section
- bias
- power supply
- chamber
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 2
- 230000002159 abnormal effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7023285U JPS61184971U (enExample) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7023285U JPS61184971U (enExample) | 1985-05-13 | 1985-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61184971U true JPS61184971U (enExample) | 1986-11-18 |
Family
ID=30606643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7023285U Pending JPS61184971U (enExample) | 1985-05-13 | 1985-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61184971U (enExample) |
-
1985
- 1985-05-13 JP JP7023285U patent/JPS61184971U/ja active Pending