JPS61184971U - - Google Patents

Info

Publication number
JPS61184971U
JPS61184971U JP7023285U JP7023285U JPS61184971U JP S61184971 U JPS61184971 U JP S61184971U JP 7023285 U JP7023285 U JP 7023285U JP 7023285 U JP7023285 U JP 7023285U JP S61184971 U JPS61184971 U JP S61184971U
Authority
JP
Japan
Prior art keywords
section
bias
power supply
chamber
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7023285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7023285U priority Critical patent/JPS61184971U/ja
Publication of JPS61184971U publication Critical patent/JPS61184971U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7023285U 1985-05-13 1985-05-13 Pending JPS61184971U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7023285U JPS61184971U (enExample) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7023285U JPS61184971U (enExample) 1985-05-13 1985-05-13

Publications (1)

Publication Number Publication Date
JPS61184971U true JPS61184971U (enExample) 1986-11-18

Family

ID=30606643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7023285U Pending JPS61184971U (enExample) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPS61184971U (enExample)

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