JPS61184403A - Magnetic head apparatus for magnetic scale - Google Patents
Magnetic head apparatus for magnetic scaleInfo
- Publication number
- JPS61184403A JPS61184403A JP2487885A JP2487885A JPS61184403A JP S61184403 A JPS61184403 A JP S61184403A JP 2487885 A JP2487885 A JP 2487885A JP 2487885 A JP2487885 A JP 2487885A JP S61184403 A JPS61184403 A JP S61184403A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- output signal
- winding
- frequency component
- scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2046—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の技術分野〕
この発明は、磁気スケールに対接して相対移動されるこ
とにより、物体の相対移動」を電気的に測定する磁気ス
ケール用磁気ヘッド装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a magnetic head device for a magnetic scale that electrically measures the relative movement of an object by moving it relative to a magnetic scale.
［発明の技術的背景］
周知のように、例えば工業用工作機械等にあっては、被
加工物の加工量を正確かつ短時間で計測したり、作業機
械の自動化を促進させたりするために、磁気スケールを
用いて長さ及び角度等を計測するようにした計測システ
ムが多く使用されている。この計測システムは、所定波
長λ（通常２００μｍ程度）で交流磁界が形成された磁
気スケールと、この磁気スケールに対接する磁気ヘッド
とを備え、この磁気スケール及び磁気ヘッドのうちの一
方を固定し他方を移動物体に連結させ、移動物体が移動
した際に磁気ヘッドから得られる信号を電気的に処理す
ることにより、移動物体の移動量を測定しようとするも
のである。[Technical Background of the Invention] As is well known, for example, in industrial machine tools, it is necessary to accurately and quickly measure the processing amount of a workpiece and to promote automation of the work machine. 2. Description of the Related Art There are many measurement systems in use that use magnetic scales to measure lengths, angles, and the like. This measurement system includes a magnetic scale on which an alternating magnetic field is formed at a predetermined wavelength λ (usually about 200 μm), and a magnetic head that is in contact with the magnetic scale. One of the magnetic scale and the magnetic head is fixed and the other is fixed. The method attempts to measure the amount of movement of a moving object by connecting the magnetic head to a moving object and electrically processing the signal obtained from the magnetic head when the moving object moves.
ここで、上記のような計測システムでは、磁気スケール
と磁気ヘッドとの相対速度が一定でなく、かつ静止状態
でも計測値の読み取りが行なえなければならないととも
に、磁気スケールや磁気ヘッドの摩耗を少なくするため
に両者を強く接触させることができない等の条件を満足
させる必要がある。このため、上記磁気ヘッドとしては
、第２図に示すように、磁気スケール１１に対接される
励磁コア１２に励磁巻線１３と信号巻線１４とを巻回し
、励１ｉｔ！巻線１３に高周波数ｆ、の励磁電流を供給
し、信号巻Ｉ！１４から上記励磁電流を前記磁気スケー
ル１１の交流磁界で変調した出力信号を取り出すように
した、いわゆる磁束応答形のものが使用されている。In the above-mentioned measurement system, the relative speed between the magnetic scale and the magnetic head is not constant, and it is necessary to be able to read measured values even when the magnetic scale is stationary, as well as to reduce wear on the magnetic scale and magnetic head. Therefore, it is necessary to satisfy conditions such as not being able to bring the two into strong contact. Therefore, as shown in FIG. 2, the above magnetic head has an excitation winding 13 and a signal winding 14 wound around an excitation core 12 that is in contact with a magnetic scale 11. An excitation current of high frequency f is supplied to the winding 13, and the signal winding I! A so-called magnetic flux responsive type is used, in which an output signal obtained by modulating the excitation current with the alternating magnetic field of the magnetic scale 11 is taken out from the magnetic scale 14.
そして、上記磁気ヘッドの信号巻線１４から得られた出
力信号は、増幅回路等を含む計測のための図示しない電
気的処理回路系に供給され、物体の相対移動量の測定に
供されるようになされている。The output signal obtained from the signal winding 14 of the magnetic head is supplied to an electrical processing circuit system (not shown) for measurement including an amplifier circuit, etc., and is used to measure the amount of relative movement of the object. is being done.
なお、近時では、高精度高出力を得るために、単一ギャ
ップタイプの磁気ヘッドに代えて、マルチギャップタイ
プの磁気ヘッドが使用されるようになってきている。Note that, in recent years, multi-gap type magnetic heads have come to be used instead of single-gap type magnetic heads in order to obtain high precision and high output.
Ｕ背景技術の問題点コ
ところで、上記信号巻線１４から得られる出力信号は、
上記励磁電流の周波数ｆ、の整数倍の高調波成分を含ん
でいる。しかしながら、計測のための電気的処理に必要
とされる出力信号は、実際上２ｆｏなる周波数成分のみ
でよい、ものである。このため、上記２ｆｏなる成分以
外の他の高調波成分が重畳されることにより、測定値に
誤差等の悪影響が及ぼされるという問題が生じるもので
ある。Problems with the Background Art By the way, the output signal obtained from the signal winding 14 is
It contains harmonic components that are integral multiples of the frequency f of the excitation current. However, the output signal required for electrical processing for measurement actually only needs to have a frequency component of 2fo. For this reason, a problem arises in that harmonic components other than the 2fo component are superimposed, which adversely affects the measured values, such as errors.
［発明の目的コ
この発明は上記事情を考慮してなされたもので、簡易な
構成で不要な高調波成分による悪影響を防止し、安定か
つ正確な移動量の測定を行ない得る極めて良好な磁気ス
ケール用磁気ヘッド装置を提供することを目的とする。[Purpose of the Invention] This invention has been made in consideration of the above circumstances, and provides an extremely good magnetic scale that has a simple configuration, can prevent the adverse effects of unnecessary harmonic components, and can measure the amount of movement stably and accurately. The object of the present invention is to provide a magnetic head device for use in a computer.
［発明の概要コ
すなわち、この発明に係る磁気スケール用磁気ヘッド装
置は、信号巻線にコンデンサを並列接続し、出力信号の
うち所望の周波数成分に同調させるようにすることによ
り、簡易な構成で不要な高調波成分による悪影響を防止
し、安定かつ正確な移動量の測定を行ない得るようにし
たものである。[Summary of the Invention] That is, the magnetic head device for a magnetic scale according to the present invention has a simple configuration by connecting a capacitor in parallel to the signal winding and tuning to a desired frequency component of the output signal. This prevents the adverse effects of unnecessary harmonic components and enables stable and accurate measurement of the amount of movement.
［発明の実施例］
以下、この発明の一実施例について図面を参照して詳細
に説明する。すなわち、第１図に示すように、信号巻線
１５に並列にコンデンサ１６を接続し、該信号巻＠ｉｓ
から得られる出力信号のうち所望の周波数成分（例えば
２ｆｏ）に同調させるようにしたことが、従来と異なる
点である。そして、この２Ｔｏなる周波数成分の出力信
号が、前述した計測のための電気的処理回路１７に供給
され、物体の移動量が測定されるものである。[Embodiment of the Invention] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. That is, as shown in FIG. 1, a capacitor 16 is connected in parallel to the signal winding 15, and the signal winding @is
The difference from the conventional method is that the output signal obtained from the conventional method is tuned to a desired frequency component (for example, 2fo). The output signal of the frequency component 2To is then supplied to the electrical processing circuit 17 for measurement described above, and the amount of movement of the object is measured.
したがって、上記実施例のような構成によれば、信号巻
線１５に並列にコンデンサ１６を接続し、出力信号のう
ち必要とする周波数成分に同調させるようにしたので、
不要な高調波成分による悪影響を容易に防止することが
でき、安定かつ正確な測定を行なうことができるもので
ある。Therefore, according to the configuration of the above embodiment, since the capacitor 16 is connected in parallel to the signal winding 15 and tuned to the required frequency component of the output signal,
The adverse effects of unnecessary harmonic components can be easily prevented, and stable and accurate measurements can be performed.
なお、この発明は上記実施例に限定されるものはなく、
この外その要旨を逸脱しない範囲で種々変形して実施す
ることができる。Note that this invention is not limited to the above embodiments,
In addition, various modifications can be made without departing from the gist of the invention.
［発明の効果コ
したがって、以上詳述したようにこの発明によれば、簡
易な構成で不要な高調波成分による悪影響を防止し、安
定かつ正確な移動量の測定を行ない得る極めて良好な磁
気スケール用磁気ヘッド装置を提供することができる。[Effects of the Invention] Therefore, as described in detail above, the present invention provides an extremely good magnetic scale that can prevent the adverse effects of unnecessary harmonic components and measure the amount of movement stably and accurately with a simple configuration. A magnetic head device for use in the present invention can be provided.
第１図はこの発明に係る磁気スケール用磁気ヘッド装置
の一実施例を示すブロック回路構成図、第２図は磁気ヘ
ッドを説明するための構成図である。
１１・・・磁気スケール、１２・・・励磁コア、１３・
・・励磁巻線、１４・・・信号巻線、１５・・・信号巻
線、１６・・・コンデンサ、１７・・・電気的処理回路
。FIG. 1 is a block circuit configuration diagram showing an embodiment of a magnetic head device for a magnetic scale according to the present invention, and FIG. 2 is a configuration diagram for explaining the magnetic head. 11... Magnetic scale, 12... Excitation core, 13.
... Excitation winding, 14... Signal winding, 15... Signal winding, 16... Capacitor, 17... Electrical processing circuit.
Claims (1)
され、励磁巻線に所定周波数の励磁電流を供給し、信号
巻線から前記励磁電流を前記磁気スケールの交流磁界で
変調した出力信号を取り出す磁束応答形の磁気スケール
用磁気ヘッド装置において、前記信号巻線にコンデンサ
を並列接続し、前記出力信号のうち所望の周波数成分に
同調させるようにしてなることを特徴とする磁気スケー
ル用磁気ヘッド装置。It is placed in contact with a magnetic scale on which an alternating magnetic field is formed at a predetermined wavelength, supplies an excitation current of a predetermined frequency to an excitation winding, and outputs an output signal obtained by modulating the excitation current with the alternating current magnetic field of the magnetic scale from a signal winding. A magnetic head device for a magnetic scale of a magnetic flux responsive type for extracting magnetic flux, characterized in that a capacitor is connected in parallel to the signal winding so as to tune to a desired frequency component of the output signal. Device.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2487885A JPS61184403A (en) | 1985-02-12 | 1985-02-12 | Magnetic head apparatus for magnetic scale |
| GB08602013A GB2170912A (en) | 1985-02-12 | 1986-01-28 | Instrumentation apparatus provided with a magnetic scale |
| DE19863603565 DE3603565A1 (en) | 1985-02-12 | 1986-02-05 | MEASURING VALUE WITH MAGNETIC SCALE |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2487885A JPS61184403A (en) | 1985-02-12 | 1985-02-12 | Magnetic head apparatus for magnetic scale |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61184403A true JPS61184403A (en) | 1986-08-18 |
Family
ID=12150451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2487885A Pending JPS61184403A (en) | 1985-02-12 | 1985-02-12 | Magnetic head apparatus for magnetic scale |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS61184403A (en) |
| DE (1) | DE3603565A1 (en) |
| GB (1) | GB2170912A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3727265A1 (en) * | 1987-08-15 | 1989-02-23 | Kostal Leopold Gmbh & Co Kg | Inductive distance pickup |
| DE3903278C2 (en) * | 1989-02-03 | 1995-09-28 | Rexroth Mannesmann Gmbh | Inductive displacement sensor arrangement |
| DE4031931A1 (en) * | 1990-10-06 | 1992-04-09 | Perthen Feinpruef Gmbh | INDUCTIVE LENGTH GAUGE |
| JP3292709B2 (en) * | 1999-07-01 | 2002-06-17 | エスエムシー株式会社 | Air chuck with measuring function |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4948360A (en) * | 1972-08-31 | 1974-05-10 | ||
| JPS5725131U (en) * | 1980-07-18 | 1982-02-09 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB879550A (en) * | 1958-09-12 | 1961-10-11 | Standard Telephones Cables Ltd | Measurement of length of magnetisable objects |
| JPS5819966B2 (en) | 1975-05-16 | 1983-04-21 | 横河電機株式会社 | displacement converter |
| JPS562760A (en) | 1979-06-21 | 1981-01-13 | Kokusai Denshin Denwa Co Ltd <Kdd> | Cross polarization measuring unit |
| JPS5967403A (en) | 1982-09-24 | 1984-04-17 | Seiko Instr & Electronics Ltd | Device for detecting displacement |
-
1985
- 1985-02-12 JP JP2487885A patent/JPS61184403A/en active Pending
-
1986
- 1986-01-28 GB GB08602013A patent/GB2170912A/en not_active Withdrawn
- 1986-02-05 DE DE19863603565 patent/DE3603565A1/en not_active Ceased
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4948360A (en) * | 1972-08-31 | 1974-05-10 | ||
| JPS5725131U (en) * | 1980-07-18 | 1982-02-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB8602013D0 (en) | 1986-03-05 |
| DE3603565A1 (en) | 1986-08-14 |
| GB2170912A (en) | 1986-08-13 |
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