JPS61183964U - - Google Patents

Info

Publication number
JPS61183964U
JPS61183964U JP6689785U JP6689785U JPS61183964U JP S61183964 U JPS61183964 U JP S61183964U JP 6689785 U JP6689785 U JP 6689785U JP 6689785 U JP6689785 U JP 6689785U JP S61183964 U JPS61183964 U JP S61183964U
Authority
JP
Japan
Prior art keywords
recovery
vacuum atmosphere
recovery plate
evaporated metal
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6689785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6689785U priority Critical patent/JPS61183964U/ja
Publication of JPS61183964U publication Critical patent/JPS61183964U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Vapour Deposition (AREA)
JP6689785U 1985-05-08 1985-05-08 Pending JPS61183964U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6689785U JPS61183964U (enrdf_load_stackoverflow) 1985-05-08 1985-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6689785U JPS61183964U (enrdf_load_stackoverflow) 1985-05-08 1985-05-08

Publications (1)

Publication Number Publication Date
JPS61183964U true JPS61183964U (enrdf_load_stackoverflow) 1986-11-17

Family

ID=30600216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6689785U Pending JPS61183964U (enrdf_load_stackoverflow) 1985-05-08 1985-05-08

Country Status (1)

Country Link
JP (1) JPS61183964U (enrdf_load_stackoverflow)

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