JPS61183963U - - Google Patents
Info
- Publication number
- JPS61183963U JPS61183963U JP6689685U JP6689685U JPS61183963U JP S61183963 U JPS61183963 U JP S61183963U JP 6689685 U JP6689685 U JP 6689685U JP 6689685 U JP6689685 U JP 6689685U JP S61183963 U JPS61183963 U JP S61183963U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- inner circumferential
- circumferential wall
- collimator
- metal vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims 1
- 238000007711 solidification Methods 0.000 claims 1
- 238000001883 metal evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6689685U JPS61183963U (enExample) | 1985-05-08 | 1985-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6689685U JPS61183963U (enExample) | 1985-05-08 | 1985-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61183963U true JPS61183963U (enExample) | 1986-11-17 |
Family
ID=30600214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6689685U Pending JPS61183963U (enExample) | 1985-05-08 | 1985-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183963U (enExample) |
-
1985
- 1985-05-08 JP JP6689685U patent/JPS61183963U/ja active Pending