JPH01173163U - - Google Patents
Info
- Publication number
- JPH01173163U JPH01173163U JP6839188U JP6839188U JPH01173163U JP H01173163 U JPH01173163 U JP H01173163U JP 6839188 U JP6839188 U JP 6839188U JP 6839188 U JP6839188 U JP 6839188U JP H01173163 U JPH01173163 U JP H01173163U
- Authority
- JP
- Japan
- Prior art keywords
- section
- crucible
- cracker
- beam source
- molecular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839188U JPH01173163U (enExample) | 1988-05-24 | 1988-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6839188U JPH01173163U (enExample) | 1988-05-24 | 1988-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173163U true JPH01173163U (enExample) | 1989-12-08 |
Family
ID=31293713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6839188U Pending JPH01173163U (enExample) | 1988-05-24 | 1988-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173163U (enExample) |
-
1988
- 1988-05-24 JP JP6839188U patent/JPH01173163U/ja active Pending