JPS61183551U - - Google Patents

Info

Publication number
JPS61183551U
JPS61183551U JP5790086U JP5790086U JPS61183551U JP S61183551 U JPS61183551 U JP S61183551U JP 5790086 U JP5790086 U JP 5790086U JP 5790086 U JP5790086 U JP 5790086U JP S61183551 U JPS61183551 U JP S61183551U
Authority
JP
Japan
Prior art keywords
vacuum chuck
guide rod
slider
substrate
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5790086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5790086U priority Critical patent/JPS61183551U/ja
Publication of JPS61183551U publication Critical patent/JPS61183551U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Radiation Pyrometers (AREA)
JP5790086U 1986-04-17 1986-04-17 Pending JPS61183551U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5790086U JPS61183551U (enrdf_load_stackoverflow) 1986-04-17 1986-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5790086U JPS61183551U (enrdf_load_stackoverflow) 1986-04-17 1986-04-17

Publications (1)

Publication Number Publication Date
JPS61183551U true JPS61183551U (enrdf_load_stackoverflow) 1986-11-15

Family

ID=30582879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5790086U Pending JPS61183551U (enrdf_load_stackoverflow) 1986-04-17 1986-04-17

Country Status (1)

Country Link
JP (1) JPS61183551U (enrdf_load_stackoverflow)

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