JPS61183529U - - Google Patents
Info
- Publication number
- JPS61183529U JPS61183529U JP6721186U JP6721186U JPS61183529U JP S61183529 U JPS61183529 U JP S61183529U JP 6721186 U JP6721186 U JP 6721186U JP 6721186 U JP6721186 U JP 6721186U JP S61183529 U JPS61183529 U JP S61183529U
- Authority
- JP
- Japan
- Prior art keywords
- film made
- layer film
- film
- metal
- surface protective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 230000001681 protective effect Effects 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6721186U JPS61183529U (cs) | 1986-05-02 | 1986-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6721186U JPS61183529U (cs) | 1986-05-02 | 1986-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61183529U true JPS61183529U (cs) | 1986-11-15 |
Family
ID=30600820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6721186U Pending JPS61183529U (cs) | 1986-05-02 | 1986-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183529U (cs) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179573A (ja) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | Haisensonohogohoho |
| JPS51102585A (ja) * | 1975-03-07 | 1976-09-10 | Hitachi Ltd | Handotaisochi |
| JPS539470A (en) * | 1976-07-15 | 1978-01-27 | Hitachi Ltd | Semiconductor device |
-
1986
- 1986-05-02 JP JP6721186U patent/JPS61183529U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5179573A (ja) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | Haisensonohogohoho |
| JPS51102585A (ja) * | 1975-03-07 | 1976-09-10 | Hitachi Ltd | Handotaisochi |
| JPS539470A (en) * | 1976-07-15 | 1978-01-27 | Hitachi Ltd | Semiconductor device |