JPS61183526U - - Google Patents
Info
- Publication number
- JPS61183526U JPS61183526U JP1985068696U JP6869685U JPS61183526U JP S61183526 U JPS61183526 U JP S61183526U JP 1985068696 U JP1985068696 U JP 1985068696U JP 6869685 U JP6869685 U JP 6869685U JP S61183526 U JPS61183526 U JP S61183526U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- semiconductor substrate
- mound
- crushing plate
- crushing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985068696U JPS61183526U (enExample) | 1985-05-09 | 1985-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985068696U JPS61183526U (enExample) | 1985-05-09 | 1985-05-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61183526U true JPS61183526U (enExample) | 1986-11-15 |
Family
ID=30603680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985068696U Pending JPS61183526U (enExample) | 1985-05-09 | 1985-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61183526U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54116881A (en) * | 1978-03-02 | 1979-09-11 | Nec Corp | Surface processor for semiconductor wafer |
| JPS57162432A (en) * | 1981-03-31 | 1982-10-06 | Toshiba Corp | Mound crushing unit |
-
1985
- 1985-05-09 JP JP1985068696U patent/JPS61183526U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54116881A (en) * | 1978-03-02 | 1979-09-11 | Nec Corp | Surface processor for semiconductor wafer |
| JPS57162432A (en) * | 1981-03-31 | 1982-10-06 | Toshiba Corp | Mound crushing unit |