JPS61104542U - - Google Patents
Info
- Publication number
- JPS61104542U JPS61104542U JP1984189272U JP18927284U JPS61104542U JP S61104542 U JPS61104542 U JP S61104542U JP 1984189272 U JP1984189272 U JP 1984189272U JP 18927284 U JP18927284 U JP 18927284U JP S61104542 U JPS61104542 U JP S61104542U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- stage
- crushing plate
- mound
- crushing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984189272U JPS61104542U (enExample) | 1984-12-13 | 1984-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984189272U JPS61104542U (enExample) | 1984-12-13 | 1984-12-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61104542U true JPS61104542U (enExample) | 1986-07-03 |
Family
ID=30746723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984189272U Pending JPS61104542U (enExample) | 1984-12-13 | 1984-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61104542U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54116881A (en) * | 1978-03-02 | 1979-09-11 | Nec Corp | Surface processor for semiconductor wafer |
| JPS57162432A (en) * | 1981-03-31 | 1982-10-06 | Toshiba Corp | Mound crushing unit |
-
1984
- 1984-12-13 JP JP1984189272U patent/JPS61104542U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54116881A (en) * | 1978-03-02 | 1979-09-11 | Nec Corp | Surface processor for semiconductor wafer |
| JPS57162432A (en) * | 1981-03-31 | 1982-10-06 | Toshiba Corp | Mound crushing unit |