JPS61183526U - - Google Patents

Info

Publication number
JPS61183526U
JPS61183526U JP6869685U JP6869685U JPS61183526U JP S61183526 U JPS61183526 U JP S61183526U JP 6869685 U JP6869685 U JP 6869685U JP 6869685 U JP6869685 U JP 6869685U JP S61183526 U JPS61183526 U JP S61183526U
Authority
JP
Japan
Prior art keywords
stage
semiconductor substrate
mound
crushing plate
crushing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6869685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6869685U priority Critical patent/JPS61183526U/ja
Publication of JPS61183526U publication Critical patent/JPS61183526U/ja
Pending legal-status Critical Current

Links

JP6869685U 1985-05-09 1985-05-09 Pending JPS61183526U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6869685U JPS61183526U (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6869685U JPS61183526U (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Publications (1)

Publication Number Publication Date
JPS61183526U true JPS61183526U (enrdf_load_stackoverflow) 1986-11-15

Family

ID=30603680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6869685U Pending JPS61183526U (enrdf_load_stackoverflow) 1985-05-09 1985-05-09

Country Status (1)

Country Link
JP (1) JPS61183526U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116881A (en) * 1978-03-02 1979-09-11 Nec Corp Surface processor for semiconductor wafer
JPS57162432A (en) * 1981-03-31 1982-10-06 Toshiba Corp Mound crushing unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116881A (en) * 1978-03-02 1979-09-11 Nec Corp Surface processor for semiconductor wafer
JPS57162432A (en) * 1981-03-31 1982-10-06 Toshiba Corp Mound crushing unit

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