JPS61104542U - - Google Patents

Info

Publication number
JPS61104542U
JPS61104542U JP18927284U JP18927284U JPS61104542U JP S61104542 U JPS61104542 U JP S61104542U JP 18927284 U JP18927284 U JP 18927284U JP 18927284 U JP18927284 U JP 18927284U JP S61104542 U JPS61104542 U JP S61104542U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
stage
crushing plate
mound
crushing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18927284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18927284U priority Critical patent/JPS61104542U/ja
Publication of JPS61104542U publication Critical patent/JPS61104542U/ja
Pending legal-status Critical Current

Links

JP18927284U 1984-12-13 1984-12-13 Pending JPS61104542U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18927284U JPS61104542U (enrdf_load_stackoverflow) 1984-12-13 1984-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18927284U JPS61104542U (enrdf_load_stackoverflow) 1984-12-13 1984-12-13

Publications (1)

Publication Number Publication Date
JPS61104542U true JPS61104542U (enrdf_load_stackoverflow) 1986-07-03

Family

ID=30746723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18927284U Pending JPS61104542U (enrdf_load_stackoverflow) 1984-12-13 1984-12-13

Country Status (1)

Country Link
JP (1) JPS61104542U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116881A (en) * 1978-03-02 1979-09-11 Nec Corp Surface processor for semiconductor wafer
JPS57162432A (en) * 1981-03-31 1982-10-06 Toshiba Corp Mound crushing unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116881A (en) * 1978-03-02 1979-09-11 Nec Corp Surface processor for semiconductor wafer
JPS57162432A (en) * 1981-03-31 1982-10-06 Toshiba Corp Mound crushing unit

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