JPS61181740U - - Google Patents

Info

Publication number

JPS61181740U

JPS61181740U JP6678185U JP6678185U JPS61181740U JP S61181740 U JPS61181740 U JP S61181740U JP 6678185 U JP6678185 U JP 6678185U JP 6678185 U JP6678185 U JP 6678185U JP S61181740 U JPS61181740 U JP S61181740U

Authority

JP

Japan

Prior art keywords

layer

conductive layer

low

antibody

conductor

Prior art date

1985-05-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000010410 layer Substances 0.000 claims description 11
• 239000004020 conductor Substances 0.000 claims description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
• 229910052782 aluminium Inorganic materials 0.000 claims description 2
• 239000011241 protective layer Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 238000004519 manufacturing process Methods 0.000 description 3
• 238000010586 diagram Methods 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• 238000005019 vapor deposition process Methods 0.000 description 1