JPS61181340U - - Google Patents

Info

Publication number

JPS61181340U

JPS61181340U JP14558884U JP14558884U JPS61181340U JP S61181340 U JPS61181340 U JP S61181340U JP 14558884 U JP14558884 U JP 14558884U JP 14558884 U JP14558884 U JP 14558884U JP S61181340 U JPS61181340 U JP S61181340U

Authority

JP

Japan

Prior art keywords

pressure

pedestal

opposite side

diaphragm

silicon

Prior art date

1984-09-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 4
• 239000010703 silicon Substances 0.000 claims description 4
• 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
• 229920001296 polysiloxane Polymers 0.000 claims 1
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000009434 installation Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 229910000679 solder Inorganic materials 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1